Mikulan, P.I. ; Fonash, S.J. ; Reinhardt, K.A. ; Ta, T.
Pub. info.:
Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.319-328, 1994. Pennington, NJ. Electrochemical Society
Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.307-312, 1994. Pennington, NJ. Electrochemical Society
Chemical surface preparation, passivation, and cleaning for semiconductor growth and processing : symposium held April 27-29, 1992, San Francisco, California, U.S.A.. pp.55-68, 1992. Pittsburgh, Pa.. Materials Research Society