1.

Technical Paper
Technical Paper
1. Development of a New Hybrid Transmission for RWD Car.
Adachi, M. ; Endo, H. ; Mikami, T. ; Yagi, K. ; Wakuta, S.
Pub. info.: 2006 SAE world congress : technical paper.  2006.  Warrendale, Penn..  Society of Automotive Engineers
Title of ser.: Society of Automotive Engineers technical paper series
Ser. no.: 2006
2.

Conference Proceedings
Conference Proceedings
2. Novel methodology of employing scatterometry to assess optical proximity correction test pattern
Asano, M. ; Koike, T. ; Mikami, T. ; Abe, H. ; Ikeda, T. ; Tanaka, S. ; Mimotogi, S.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XIX.  pp.9-18,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5752
3.

Conference Proceedings
Conference Proceedings
3. The sidewall angle dependence of CDSEM measurements and its impact on CD process control
Koike, T. ; Asano, M. ; Mikami, T. ; Yamazaki, Y.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XIX.  pp.19-29,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5752