1.

Conference Proceedings
Conference Proceedings
1. Diamondlike Carbon Materials for the BEOL Interlayer Dielectric Applications
Grill, A. ; Jahnes, C. ; Ott, J. ; Patel, V. ; Cohln, S. ; Hummel, J. ; Mih, R. ; Liu, J.
Pub. info.: Dielectric material integration for microelectronics.  pp.118-128,  1998.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 98-3
2.

Conference Proceedings
Conference Proceedings
2. POINT DEFECTS IN GALLIUM ARSENIDE CHARACTERIZED BY POSITRON ANNIHILATION SPECTROSCOPY AND DEEP LEVEL TRANSIENT SPECTROSCOPY
Mih, R. ; Gronsky, R. ; Dahlen, A. ; Howell, R. H. ; Sterne, P. A.
Pub. info.: Microstructure of irradiated materials : Symposium held November 29-1 December, 1994, Boston, Massachusetts USA.  pp.517-,  1995.  Pittsburgh, Pa.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 373
3.

Conference Proceedings
Conference Proceedings
3. Integration Issues for Diamond-Like Carbon in a Copper Damascene Process Flow
Grill, A. ; Jahnes, C. ; Patel, V. ; Ott, J. ; Hummel, J. ; Mih, R. ; Liu, J.
Pub. info.: Low-dielectric constant materials IV : symposium held April 14-16, 1998, San Francisco, California, U.S.A..  pp.223-,  1998.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 511