1.

Conference Proceedings

Conference Proceedings
Nazmov,V.P. ; Pindyurin,V.F. ; Mezentseva,L.A. ; Mchedlishvili,B.V. ; Vilensky,A.I.
Pub. info.: Emerging lithographic technologies III : 15-17 March 1999, Santa Clara, California.  Part2  pp.812-815,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3676
2.

Conference Proceedings

Conference Proceedings
Nazmov,V.P. ; Pindyurin,V.F. ; Mezentseva,L.A. ; Mchedlishvili,B.V. ; Vilensky,A.I. ; Shirkova,V.V. ; Istomin,V.E.
Pub. info.: Emerging lithographic technologies IV : 28 February-1 March 2000, Santa Clara, USA.  pp.881-883,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3997
3.

Conference Proceedings

Conference Proceedings
Litvin,S.V. ; Kanaev,V.G. ; Larionova,E.G. ; Glazunova,N.V. ; Gromova,L.P. ; Yurchenko,V.I. ; Timchenko,N.A. ; Mezentseva,L.A. ; Nazmov,V.P. ; Pindyurin,V.F.
Pub. info.: Emerging lithographic technologies III : 15-17 March 1999, Santa Clara, California.  Part2  pp.426-428,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3676
4.

Conference Proceedings

Conference Proceedings
Kulipanov,G.N. ; Makarov,O.A. ; Mezentseva,L.A. ; Mishnev,S.I. ; Nazmov,V.P. ; Pindyurin,V.F. ; Skrinsky,A.N. ; Artamonova,L.D. ; Cherkov,G.A. ; Gashtold,V.N. ; Prokopenko,V.S. ; Chesnokov,V.V. ; Reznikova,E.F.
Pub. info.: Electron-beam, X-ray, EUV, and ion-beam submicrometer lithographies for manufacturing VI : 11-13 March 1996, Santa Clara, California.  pp.268-275,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2723