Teerlinck, I. ; Schmidt, H.F. ; Rotondaro, A.L.P. ; Hurd, T.Q. ; Mouche, L. ; Mertens, P.W. ; Meuris, M. ; Heyns, M.M. ; Vanhaeren, D. ; Vandervorst, W.
Pub. info.:
Proceedings of the Fourth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.284-291, 1995. Pennington, NJ. Electrochemical Society
Proceedings of the Fourth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.277-283, 1995. Pennington, NJ. Electrochemical Society
Mertens, P.W. ; Hurd, T.Q. ; Graf, D. ; Meuris, M. ; Schmidt, H.F. ; Heyns, M.M.
Pub. info.:
Proceedings of the Symposium on Contamination Control and Defect Reduction in Semiconductor Manufacturing III. pp.241-252, 1994. Pennington, NJ. Electrochemical Society
Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.89-96, 1997. Pennington, NJ. Electrochemical Society
Bearda, T. ; Mertens, P.W. ; Woerlee, P.H. ; Wallinga, H. ; Sebmolke, R. ; Heyns, M.
Pub. info.:
Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology. pp.528-539, 2002. Pennington, NJ. Electrochemical Society
Teerlinek, I. ; Gomes, W.P. ; Strubbe, K. ; Mertens, P.W. ; Heyns, M.M.
Pub. info.:
Electrochemical processing in ULSI fabrication and semiconductor/metal deposition II : proceedings of the international symposium. pp.156-159, 1999. Pennington, N.J.. Electrochemical Society
Holsteyns, F. ; Riskin, A. ; Maes, A. ; Vereecke, G. ; Mertens, P.W.
Pub. info.:
Cleaning technology in semiconductor device manufacturing VIII : proceedings of the international symposium. pp.161-167, 2003. Pennington, NJ. Electrochemical Society
Trauwaert, M.-A. ; Kenis, K. ; Caymax, M. ; Mertens, P.W. ; Heyns, M.M. ; Vanhellemont, J. ; Graf, D. ; Wagner, P.
Pub. info.:
Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.455-462, 1997. Pennington, NJ. Electrochemical Society
Mertens, P.W. ; Loewenstein, L. ; Vos, R. ; De Gendt, S. ; Bearda, T. ; Heynes, M.M.
Pub. info.:
Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology. pp.592-606, 1998. Pennington, NJ. Electrochemical Society