1.

Conference Proceedings
Conference Proceedings
1. Effect Of Ge Pre-Amorphization On Junction Characteristics For Low Energy B Implants
Liu, J. ; Mehta, Sandeep
Pub. info.: Si front-end processing - physics and technology of dopant-defect interactions II : symposium held April 24-27, 2000, San Francisco, California, U.S.A..  pp.B4.6-,  2001.  Warrendale, PA.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 610
2.

Conference Proceedings
Conference Proceedings
2. Angular Integrity Challenge For Ion Implantation Processes In Advanced CMOS Devices
Jin, Jian-Yue ; Jeong, Ukyc ; Weeman, John ; Mehta, Sandeep
Pub. info.: Semiconductor technology (ISTC 2001) : proceedings of the 1st International Conference on Semiconductor Technology.  pp.248-258,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-17
3.

Conference Proceedings
Conference Proceedings
3. PROCESS AND EQUIPMENT ISSUES IN RAPID THERMAL OXIDATION (RTO)
Mehta, Sandeep ; Hodul, David
Pub. info.: Rapid thermal processing of electronic materials : symposium held April 21-23, 1987, Anaheim California, U.S.A..  pp.95-102,  1987.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 92
4.

Conference Proceedings
Conference Proceedings
4. Device Parametric Shift Mechanism Caused by Boron Halo Redistribution Resulting from Dose Rate Dependence of SDE Implant
Jeong, Ukyo ; Liu, Jinning ; Guo, Baonian ; Shim, Kyuha ; Mehta, Sandeep
Pub. info.: Semiconductor defect engineering - materials, synthetic structures and devices : symposium held March 28-April 1, 2005, San Francisco, California, U.S.A..  pp.377-382,  2005.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 864