1.

Conference Proceedings
Conference Proceedings
1. Patterning sub-50-nm Fin-FET using KrF lithography tool
Singh, N. ; Jagar, S. ; Mehta, S.S. ; Roy, M.M. ; Kumar, R. ; Balasubramanian, N.
Pub. info.: Design and process integration for microelectronic manufacturing II [sic] : 26-27 February 2004, Santa Clara, California, USA.  pp.260-267,  2004.  Bellingham, Wash., USA.  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5379
2.

Technical Paper
Technical Paper
2. Dynamic Target State Estimation for Autonomous Aerial Vehicles using a Monocular Camera Systems.
Causey, R.S. ; Mehta, S.S. ; Lind, R. ; Dixon, W.
Pub. info.: 2007 Aerotech Congress & Exhibition : SAE technical paper.  2007.  Warrendale, Penn..  Society of Automotive Engineers
Title of ser.: Society of Automotive Engineers technical paper series
Ser. no.: 2007
3.

Conference Proceedings
Conference Proceedings
3. Evaluation of alignment target designs for Cu and low-K dual damascene processes
Mukherjee-Roy, M. ; Singh, N. ; Mehta, S.S. ; Chik, W.M. ; Sim, C.T. ; Cheong, F.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVII.  1  pp.93-102,  2003.  Bellingham, WA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5038
4.

Conference Proceedings
Conference Proceedings
4. Impact of scattering bars in damascene trench patterning
Mehta, S.S. ; Singh, N. ; Mukherjee-Roy, M. ; Kumar, R.
Pub. info.: Optical Microlithography XVI.  Part Two  pp.967-971,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5040
5.

Conference Proceedings
Conference Proceedings
5. Key challenges in across-pitch 0.33-k1 trench patterning using hybrid mask
Singh, N. ; Mukherjee-Roy, M. ; Mehta, S.S. ; Suda, H. ; Kubota, T. ; Kimura, Y. ; Kinoshita, H.
Pub. info.: Optical Microlithography XVII.  pp.1334-1341,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5377
6.

Conference Proceedings
Conference Proceedings
6. Alignment in chromeless masks
Mukherjee-Roy, M. ; Singh, N. ; Mehta, S.S. ; Suda, H. ; Kubota, T. ; Kimura, Y. ; Kinoshita, H.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVIII.  pp.96-104,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5375