1.

Conference Proceedings
Conference Proceedings
1. Micromachined pressure gauge for the vacuum range based on damping of a resonator
Kurth,S. ; Hiller,K. ; Zichner,N. ; Mehner,J. ; Iwert,T. ; Biehl,S. ; Dotzel,W. ; Gessner,T.
Pub. info.: MEMS components and applications for industry, automobiles, aerospace, and communication : 22-23 October 2001, San Francisco, USA.  pp.103-111,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4559
2.

Conference Proceedings
Conference Proceedings
2. Synchronously working micromirrors for beam steering:design and application aspects
Kurth,S. ; Kehr,K. ; Mehner,J. ; Kaufmann,C. ; Hahn,R. ; Seidel,R. ; Doetzei,W. ; Cessner,T.
Pub. info.: Optical scanning : design and applications : 21-22 July 1999, Denver, Colorado.  pp.63-73,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3787
3.

Conference Proceedings
Conference Proceedings
3. Analogously working micromirror arrays
Kehr,K. ; Kurth,S. ; Mehner,J. ; Kaufmann,C. ; Hahn,R. ; Dotzel,W. ; Gessner,T.
Pub. info.: Miniaturized Systems with Micro-Optics and MEMS.  pp.80-89,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3878
4.

Conference Proceedings
Conference Proceedings
4. Hybrid microdosing system
Nguyen,N.T. ; Richter,S. ; Mehner,J. ; Schubert,S. ; DotzeI,W. ; Gebner,T.
Pub. info.: Micromachined Devices and Components IV.  pp.415-423,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3514