1.

Conference Proceedings
Conference Proceedings
1. Model building, control design, and practical implementation of a high precision high dynamical MEMS acceleration sensor (Invited Paper)
Wolfram, H. ; Schmiedel, R. ; Hiller, K. ; Aurich, T. ; Gunther, W. ; Kurth, S. ; Mehner, J. ; Dotzel, W. ; GeBner, T.
Pub. info.: Smart sensors, actuators, and MEMS II : 9-11 May 2005, Seville, Spain.  pp.326-340,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5836
2.

Conference Proceedings
Conference Proceedings
2. Frequency-selective silicon vibration sensor with direct electrostatic stiffness modulation
Scheibner, D. ; Wibbeler, J. ; Mehner, J. ; Braemer, B. ; Gessner, T. ; Doetzel, W.
Pub. info.: Design, test, integration, and packaging of MEMS/MOEMS 2002 : 6-8 May, 2002, Cannes, France.  pp.325-332,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4755
3.

Conference Proceedings
Conference Proceedings
3. Investigation of heat transfer in micromirrors
Kehr, K. ; Kurth, S. ; Mehner, J. ; Dotzel, W. ; Cessner, T.
Pub. info.: Microsystems Metrology and Inspection.  pp.24-35,  1999.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3825
4.

Conference Proceedings
Conference Proceedings
4. A novel 24-kHz resonant scanner for high-resolution laser display
Kurth, S. ; Kaufmann, C. ; Hahn, R. ; Mehner, J. ; Dotzel, W. ; Gessner, T.
Pub. info.: MOEMS Display and Imaging Systems III.  pp.23-33,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5721