1.

Conference Proceedings
Conference Proceedings
1. CHARACTERIZATION OF PSG FILMS REFLOWED IN STEAM USING RAPID THERMAL PROCESSING
Shah, N. ; McVittie, J. ; Sharif, N. ; Nulman, J. ; Gat, A.
Pub. info.: Rapid thermal processing : symposium held December 2-4, 1985, Boston, Massachusetts, U.S.A..  pp.233-240,  1985.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 52
2.

Conference Proceedings
Conference Proceedings
2. Characterization of Plasma Surface Charging Using a Real- Time On-Wafer Probe
Ma, S. ; McVittie, J.
Pub. info.: Proceedings of the Symposium on Process control, Diagnostics, and Modeling in Semiconductor Manufacturing.  pp.401-411,  1995.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 95-2