1.

Conference Proceedings
Conference Proceedings
1. Direct to digital holography for semiconductor wafer defect detection and review(Invited Paper)
Thomas, C.E., Jr. ; Bahm, T.M. ; Baylor, L.R. ; Bingham, P.R. ; Burns, S.W. ; Chidley, M.D. ; Dai, X.L. ; Delahanty, R.J. ; Doti, C.J. ; El-Khashab, A. ; Fisher, R.L. ; Gilbert, J.M. ; Goddard, J.S. ; Hanson, G.R. ; Hickson, J.D. ; Hunt, M.A. ; Hylton, K.W. ; John, G.C. ; Jones, M.L. ; MacDonald, K.R. ; Mayo, M.W. ; McMackin, I. ; Patek, D.R. ; Price, J.H. ; Rasmussen, D.A. ; Schaefer, L.J. ; Scheidt, T.R. ; Schulze, M.A. ; Schumaker, P.D. ; Shen, B. ; Smith, R.G. ; Su, A.N. ; Tobin, K.W., Jr. ; Usry, W.R. ; voelkl, E. ; Weber, K.S. ; Jones, P.G. ; Owen, R.W.
Pub. info.: Design, process integration, and characterization for microelectronics : 6-7 March 2002, Santa Clara, USA.  pp.180-194,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4692
2.

Conference Proceedings
Conference Proceedings
2. Defect inspection for imprint lithography using a die to database electron beam verification system [6151-22]
Myron, L. J ; Thompson ; McMackin, I. ; Resnick, D. J. ; Kitamura, T. ; Hasebe, T ; Nakazawa, S ; Tokumoto, T. ; Ainley, E. ; Nordquist, K ; Dauksher, W. J.
Pub. info.: Emerging Lithographic Technologies X.  pp.61510M-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6151
3.

Conference Proceedings
Conference Proceedings
3. Design and performance of a step and repeat imprinting machine
McMackin, I. ; Schumaker, P. ; Babbs, D. ; Choi, J. ; Collison, W. ; Sreenivasan, S.V. ; Schumaker, N.E. ; Watts, M.P.C. ; Voisin, R.D.
Pub. info.: Emerging Lithographic Technologies VII.  1  pp.178-186,  2003.  Bellingham, WA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5037
4.

Conference Proceedings
Conference Proceedings
4. Analysis of critical dimension uniformity for Step and Flash imprint lithography
Mancini, D.P. ; Gehoski, K.A. ; Dauksher, W.J. ; Nordquist, K.J. ; Resnick, D.J. ; Schumaker, P. ; McMackin, I.
Pub. info.: Emerging Lithographic Technologies VII.  1  pp.187-196,  2003.  Bellingham, WA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5037
5.

Conference Proceedings
Conference Proceedings
5. Template fabrication for sub-80-nm contact hole patterning using step and flash imprint lithography
Mancini, D.P. ; Gehoski, K.A. ; Dauksher, W.J. ; Nordquist, K.J. ; Resnick, D.J. ; Schumaker, P. ; McMackin, I.
Pub. info.: 23rd Annual BACUS Symposium on Photomask Technology.  pp.122-131,  2003.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5256
6.

Conference Proceedings
Conference Proceedings
6. Step and Repeat UV nanoimprint lithography tools and processes
McMackin, I. ; Choi, J. ; Schumaker, P. ; Nguyen, V. ; Xu, F. ; Thompson, E. ; Babbs, D. ; Sreenivasan, S.V. ; Watts, M. ; Schumaker, N.
Pub. info.: Emerging Lithographic Technologies VIII.  pp.222-231,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5374
7.

Conference Proceedings
Conference Proceedings
7. Development of imprint materials for the Step and Flash Imprint Lithography process
Xu, F. ; Stacey, N.A. ; Watts, M. ; Truskett, V. ; McMackin, I. ; Choi, J. ; Schumaker, P. ; Thompson, E. ; Babbs, D. ; Sreenivasan, S.V. ; Willson, C.G. ; Schumaker, N.
Pub. info.: Emerging Lithographic Technologies VIII.  pp.232-241,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5374