1.

Conference Proceedings
Conference Proceedings
1. DRY ETCH INDUCED DEFECTS OF GaAs SURFACES PRODUCED BY CH4/H2/Ar PLASMAS
McLane, G. F. ; Buchwald, W. R.
Pub. info.: Compound semiconductor epitaxy : symposium held April 4-7, 1994, San Francisco, California, U.S.A..  pp.221-,  1994.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 340
2.

Conference Proceedings
Conference Proceedings
2. Dry Etching of SiC for Advanced Device Applications
Flemish, J. R. ; Xie, K. ; McLane, G. F.
Pub. info.: Compound semiconductor electronics and photonics : symposium held April 8-10, 1996, San Francisco, California, U.S.A..  pp.153-,  1996.  Pittsburgh, Penn.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 421
3.

Conference Proceedings
Conference Proceedings
3. Plasma Chemistries for Dry Etching GaN, AlN, InGaN and InAlN
Pearton, S. J. ; Vartuli, C. B. ; Lee, J. W. ; Donovan, S. M. ; MacKenzie, J. D. ; Abernathy, C. R. ; Shul, R. J. ; McLane, G. F. ; Ren, F.
Pub. info.: Compound semiconductor electronics and photonics : symposium held April 8-10, 1996, San Francisco, California, U.S.A..  pp.309-,  1996.  Pittsburgh, Penn.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 421
4.

Conference Proceedings
Conference Proceedings
4. Ge OPTICAL INTERCONNECTS ON A GaAs SURFACE
Dubey, M. ; McLane, G. F. ; Jones, K. A. ; Lareau, R. T. ; Eckart, D. W. ; Han, W. Y. ; Roberts, C. ; Dunkel, J. ; West, L. C.
Pub. info.: Compound semiconductor epitaxy : symposium held April 4-7, 1994, San Francisco, California, U.S.A..  pp.411-,  1994.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 340
5.

Conference Proceedings
Conference Proceedings
5. Cathodoluminescence Study of Diffusion Length and Surface Recombination Velocity in III-V Multiple Quantum Well Structures
Chao, L-L. ; Freiler, M. B. ; Levy, M. ; Lin, J-L. ; Cargill, G. S., III ; Osgood, R. M., Jr. ; McLane, G. F.
Pub. info.: Diagnostic techniques for semiconductor materials processing II : symposium held November 27-30, 1995, Boston, Massachusetts, U.S.A..  pp.543-,  1996.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 406
6.

Conference Proceedings
Conference Proceedings
6. DRY ETCHING OF Ta-Si-N DIFFUSION BARRIER MATERIAL IN CF4+O2 GAS MIXTURES
McLane, G. F. ; Casas, L. ; Reid, J. S. ; Kolawa, E. ; Nicolet, M-A.
Pub. info.: Advanced metallization for devices and circuits--science, technology, and manufacturability : symposium held April 4-8, 1994, San Francisco, California, U.S.A..  pp.669-,  1994.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 337
7.

Conference Proceedings
Conference Proceedings
7. Dry Etching of III-V Nitrides
Pearton, S. J. ; Shul, R. J. ; McLane, G. F. ; Constantine, C.
Pub. info.: Gallium nitride and related materials : the First International Symposium on Gallium Nitride and Related Materials held November 27-December 1, 1995, Boston, Massachusetts, U.S.A..  pp.717-,  1996.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 395