1.

Conference Proceedings
Conference Proceedings
1. Chlorine Precursors for Gate Oxidation Processes
McGeary, M. J. ; Martens, P. W. ; Vermeire, B. ; Heyns, M. ; Sprey, H. ; Lubbers, A. ; Schaekers, M.
Pub. info.: Environmental, safety, and health issues in IC production : symposium held December 4-5, 1996, Boston, Massachusetts, U.S.A..  pp.115-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 447
2.

Conference Proceedings
Conference Proceedings
2. Effect of Cl in Gate Oxidation
Mertens, P. W. ; McGeary, M. J. ; Schaekers, M. ; Sprey, H. ; Vermeire, B. ; Depas, M. ; Meuris, M. ; Heyns, M. M.
Pub. info.: Science and technology of semiconductor surface preparation : symposium held April 1-3, 1997, San Francisco, California, U.S.A..  pp.89-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 477
3.

Conference Proceedings
Conference Proceedings
3. Effect of Cl in Gate Oxidation
Mertens, P. W. ; McGeary, M. J. ; Schaekers, M. ; Sprey, H. ; Vermeire, B. ; Depas, M. ; Meuris, M. ; Heyns, M. M.
Pub. info.: Materials reliability in microelectronics VII : symposium held April 8-12, 1997, San Francisco, California, U.S.A..  pp.149-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 473