1.

Conference Proceedings

Conference Proceedings
Ryan, J.G. ; Hay, J. ; Shaw, T. ; Purushothaman, S. ; Hedrick, J. ; Davis, C. ; McGahay, V. ; Goldblatt, R.
Pub. info.: ULSI process integration : proceedings of the first international symposium.  pp.323-328,  1999.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-18
2.

Conference Proceedings

Conference Proceedings
Stamper, A. K. ; McGahay, V. ; Shapiro, M. ; Miller, L. A. ; Tian, X. ; Bryant, A. ; Serianni, L. A.
Pub. info.: Low-dielectric constant materials II : symposium held December 2-3, 1996, Boston, Massachusetts, U.S.A..  pp.183-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 443