Stamper, A. K. ; McGahay, V. ; Shapiro, M. ; Miller, L. A. ; Tian, X. ; Bryant, A. ; Serianni, L. A.
Pub. info.:
Low-dielectric constant materials II : symposium held December 2-3, 1996, Boston, Massachusetts, U.S.A.. pp.183-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society