1.

Conference Proceedings
Conference Proceedings
1. ISOTHERMAL ANNEALING OF ION IMPLANTED SILICON WITH A GRAPHITE RADIATION SOUCE
Wilson, S. R. ; Gregory, R. B. ; Paulson, W. M. ; Handi, A. H. ; McDaniel, F. D.
Pub. info.: Laser-solid interactions and transient thermal processing of materials : symposium held November 1982 in Boston, Massachusetts, U.S.A..  pp.369-374,  1983.  New York.  North-Holland
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 13
2.

Conference Proceedings
Conference Proceedings
2. CHARACTERIZATION OF N-TYPE LAYERS FORMED IN Si BY ION IMPLANTATION OF HYDROGEN
Wilson, S. R. ; Paulson, W. M. ; Krolikowski, W. F. ; Fathy, D. ; Gressett, J. D. ; Hamdi, A. H. ; McDaniel, F. D.
Pub. info.: Ion implantation and ion beam processing of materials : symposium held November 1983 in Boston, Massachusetts, U.S.A..  pp.287-292,  1984.  New York.  North-Holland
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 27
3.

Conference Proceedings
Conference Proceedings
3. Trace-Element Accelerator Mass Spectrometry: A New Technique for Low-Level Impurity Measurements in Semiconductors
Datar, S. A. ; Renfrow, S. N. ; Anthony, J. M. ; McDaniel, F. D.
Pub. info.: Diagnostic techniques for semiconductor materials processing II : symposium held November 27-30, 1995, Boston, Massachusetts, U.S.A..  pp.395-,  1996.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 406