Gruen, D.M. ; Krauss, A.R. ; Zhou, D. ; McCauley, T.G. ; Corrigan, T.D. ; Chang, R.P.H. ; Swain, G.M.
Pub. info.:
Chemical vapor deposition : proceedings of the Fourteenth International Conference and EUROCVD-11. pp.325-332, 1997. Pennington, NJ. Electrochemical Society