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Conference Proceedings

1. THE FORMATION OF TiN-ENCAPSULATED Cu INTERCONNECTS

Li, Jian ; Straine, J. W. ; Russell, S. W. ; Chapman, P. ; Shachm-Diamand Y. ; Mayer, J. W.

Pub. info.:	Advanced metallization and processing for semiconductor devices and circuits--II : symposium held April 27-May 1, 1992, San Francisco, California, U.S.A.. pp.605-610, 1992. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	260

Conference Proceedings

2. *THERMAL STABILITY OF CoSi2 ON SINGLE CRYSTAL AND POLYCRYSTALLINE SILICON

Phillips, J. R. ; Revesz, P. ; Olowolafe, J. O. ; Mayer, J. W.

Pub. info.:	Advanced metallizations in microelectronics : symposium held April 16-20, 1990, San Francisco, California, U.S.A.. pp.159-166, 1990. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	181

Conference Proceedings

3. Lattice Imaging of Silicide-Silicon Interfaces

Chen, L. J. ; Mayer, J. W. ; Tu, K. N. ; Sheng, T. T.

Pub. info.:	Thin films and interfaces : proceedings of the Materials Research Society Annual Meeting, November 1981, Boston Park Plaza Hotel, Boston, Massachusetts, U.S.A.. pp.93-100, 1982. New York. North-Holland
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	10

Conference Proceedings

4. PULSED BEAMS AND ION BEAM MIXING: METAL-Si AND METAL-METAL STRUCTURES*

Mayer, J. W. ; Fastow, R. ; Galvin, G. ; Hung, L. S. ; Nastasi, M. ; Thompson, M. O. ; Zheng, L. R.

Pub. info.:	Metastable materials formation by ion implantation : proceedings of the Materials Research Society annual meeting, November 1981, Boston Park Plaza Hotel, Boston, Massachusetts, U.S.A.. pp.125-132, 1982. New York. North-Holland
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	7

Conference Proceedings

5. Formation and Structure of Epitaxial NiSi2 and CoSi2

Chen, L. J. ; Mayer, J. W. ; Tu, K. N.

Pub. info.:	Thin films and interfaces : proceedings of the Materials Research Society Annual Meeting, November 1981, Boston Park Plaza Hotel, Boston, Massachusetts, U.S.A.. pp.137-144, 1982. New York. North-Holland
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	10

Conference Proceedings

6. NUCLEATION AND GROWTH KINETICS OF Cu2O DURING REDUCTION OF CuO THIN FILMS

Li, Jian ; Tu, K. N. ; Mayer, J. W.

Pub. info.:	Phase transformation kinetics in thin films : symposium held April 29-May 1, 1991, Anaheim, California, U.S.A.. pp.339-344, 1992. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	230

Conference Proceedings

7. THERMAL STUDIES OF Au-Ti THIN FILMS DEPOSITED ON OXIDE SUBSTRATES

Strane, J, W. ; Russell, S. W. ; Li, Jian ; Mayer, J. W.

Pub. info.:	Advanced metallization and processing for semiconductor devices and circuits--II : symposium held April 27-May 1, 1992, San Francisco, California, U.S.A.. pp.935-940, 1992. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	260

Conference Proceedings

8. DOPANT DIFFUSION AND GRAIN GROWTH IN ARSENIC-IMPLANTED POLY-Si

Zheng, L. R. ; Hung, L. S. ; Mayer, J. W.

Pub. info.:	Polysilicon films and interfaces : symposium held December 1-3, 1987, Boston, Massachusetts, U.S.A.. pp.135-142, 1988. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	106

Conference Proceedings

9. DEGRADATION OF MICRON-SIZED SILICIDE LINES ON POLYCRYSTALLINE SILICON

Phillips, J. R. ; Zheng, L. R. ; Mayer, J. W.

Pub. info.:	Polysilicon films and interfaces : symposium held December 1-3, 1987, Boston, Massachusetts, U.S.A.. pp.155-162, 1988. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	106

10.

Conference Proceedings

10. Interaction of Al films on single crystal Si substrates induced by ion irradiation and post-anneal

Hung, L. S. ; Chen, S. H. ; Mayer, J. W.

Pub. info.:	Thin films and interfaces II : symposium held November 1983, in Boston, Massachusetts, U.S.A.. pp.253-260, 1984. New York. North-Holland
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	25

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