Micromachined devices and components II : 14-15 October 1996, Austin, Texas. pp.248-258, 1996. Bellingham, WA. SPIE-The International Society for Optical Engineering
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Micromachining and microfabrication process technology V : 20-22 September, 1999, Santa Clara, California. pp.174-187, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
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