1.

Conference Proceedings
Conference Proceedings
1. Two-frequency MOPA diode laser system for difference-frequency generation of coherent THz waves
Matsuura,S. ; Chen,P. ; Blake,G.A. ; Pearson,J.C. ; Pickett,H.M.
Pub. info.: Terahertz spectroscopy and applications : 25-26 January 1999, San Jose, California.  pp.14-21,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3617
2.

Conference Proceedings
Conference Proceedings
2. Effect of stage synchronization error of KrF scan on 0.18-ｦﾌm patterning
Uchiyama,T. ; Hashimoto,T. ; Fujimoto,M. ; Matsuura,S. ; Yamazaki,T. ; Kasama,K.
Pub. info.: Optical microlithography XI : 25-27 February 1998, Santa Clara, California.  pp.67-76,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3334
3.

Conference Proceedings
Conference Proceedings
3. FIS:far-infrared surveyor on board ASTRO-F(IRIS)
Takahashi,H. ; Shibai,H. ; Kawada,M. ; Hirao,T. ; Watabe,T. ; Tsuduku,Y. ; Nagata,H. ; Utsuno,H. ; Hibi,Y. ; Hirooka,S. ; Nakagawa,T. ; Kaneda,H. ; Matsuura,S. ; Kii,T. ; Okamura,Y. ; Doi,Y. ; Matsuo,H. ; Hiromoto,N. ; Fujiwara,M.
Pub. info.: UV, optical, and IR space telescopes and instruments : 29-31 March 2000, Munich, Germany.  pp.47-58,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4013
4.

Conference Proceedings
Conference Proceedings
4. Design and characterization of optical-THz phase-matched traveling-wave photomixers
Matsuura,S. ; Blake,G.A. ; Wyss,R.A. ; Pearson,J.C. ; Kadow,C. ; Jackson,A.W. ; Gossard,A.C.
Pub. info.: Terahertz and gigahertz photonics : 19-23 July 1999, Denver, Colorado.  pp.484-492,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3795
5.

Conference Proceedings
Conference Proceedings
5. Flight performance of the Near-Infrared Spectrometer
Noda,M. ; Matsumoto,T. ; Murakami,H. ; Kawada,M. ; Tanaka,M. ; Matsuura,S. ; Guo,H.
Pub. info.: Infrared spaceborne remote sensing IV : 6-7 August 1996, Denver, Colorado.  pp.248-257,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2817
6.

Conference Proceedings
Conference Proceedings
6. Influence of resist process on the best focus shift due to lens spherical aberration
Matsuura,S. ; Uchiyama,T. ; Tanabe,H.
Pub. info.: Optical microlithography XIII : 1-3 March 2000, Santa Clara, USA.  Part2  pp.1299-1310,  2000.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4000
7.

Conference Proceedings
Conference Proceedings
7. DOF enhancement of isolated line patterns by newly developed assistant pattern method
Matsuura,S. ; Hashimoto,T. ; Uchiyama,T. ; Fujimoto,M. ; Kasama,K.
Pub. info.: Optical Microlithography X.  pp.245-256,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3051
8.

Conference Proceedings
Conference Proceedings
8. Reduction of mask error enhancement factor (MEEF) by the optimum exposure dose self-adjusted mask
Matsuura,S. ; Uchiyama,T. ; Hashimoto,T.
Pub. info.: Optical Microlithography XIV.  4346  pp.831-841,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4346
9.

Conference Proceedings
Conference Proceedings
9. Comparison between optical proximity effect of positive and negative tone patterns in KrF lithography
Fujimoto,M. ; Hashimoto,T. ; Uchiyama,T. ; Matsuura,S. ; Kasama,K.
Pub. info.: Optical Microlithography X.  pp.739-750,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3051