1.

Conference Proceedings
Conference Proceedings
1. Accurate proximity correction method with total-process proximity-based correction factor(TCF)
Hashimoto,K. ; Usui,S. ; Hasebe,S. ; Murota,M. ; Nakayama,T. ; Matsuoka,F. ; Inoue,S. ; Kobayashi,S. ; Yamamoto,K.
Pub. info.: Optical microlithography XI : 25-27 February 1998, Santa Clara, California.  pp.224-233,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3334
2.

Conference Proceedings
Conference Proceedings
2. Nd:YAG oscillator-amplifier with a photorefractive phase conjugator
Tei,K. ; Niwa,Y. ; Kato,M. ; Matsuoka,F. ; Maruyama,Y. ; Arisawa,T.
Pub. info.: Advanced high-power lasers : 1-5 November 1999, Osaka, Japan.  pp.627-632,  2000.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3889