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33 results

Conference Proceedings

1. * LOW-TEMPERATURE CHEMICAL-VAPOR DEPOSITION OF AMORPHOUS SEMICONDUCTORS AND INSULATORS

Matsumura, M. ; Sugiura, O.

Pub. info.:	Amorphous silicon technology, 1993 : Symposium held April 13-16, San Francisco, California, U.S.A.. pp.109-120, 1993. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	297

Conference Proceedings

2. Highly Packed and Ultra-Large Si Grains Grown by a Single-Shot Irradiation of Excimer-Laser Light Pulse

Sano, Y. ; Yeh, W-C. ; Matsumura, M.

Pub. info.:	Thin Film Transistor Technologies V : proceedings of the International Symposium. pp.261-268, 2000. Pennington, N.J.. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2000-31

Conference Proceedings

3. Two-Dimensionally Position-Controlled Ultra-Large Grain Growth Based on Phase-Modulated Excimer-Laser Annealing Method

Nakata, M. ; Matsumura, M.

Pub. info.:	Thin Film Transistor Technologies V : proceedings of the International Symposium. pp.148-154, 2000. Pennington, N.J.. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2000-31

Conference Proceedings

4. Chemical Vapor Deposition of CF3 Incorporated Silica Films for Interlayer Dielectric Application

Sugahara, S. ; Fukumura, T. ; Matsumura, M.

Pub. info.:	Interconnect and contact metallization for ULSI : proceedings of the international symposium. pp.283-290, 1999. Pennington, N.J.. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	99-31

Conference Proceedings

5. A Brief Review of Thin-Film Transistor Research Done in Tokyo Institute of Technology

Matsumura, M.

Pub. info.:	Thin Film Transistor Technologies V : proceedings of the International Symposium. pp.11-24, 2000. Pennington, N.J.. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2000-31

Conference Proceedings

6. A Projection-Type Excimer-Laser Crystallization System for Ultra-Large Grain Growth of Si Thin Films

Matsumura, M. ; Nakata, M. ; Oh, C-H.

Pub. info.:	Flat-panel displays and sensors - principles, materials and processes : symposium held April 4-9, 1999, San Francisco, California, U.S.A.. pp.187-192, 2000. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	558

Conference Proceedings

7. Life of Internal Reformer for MCFC

Matsumura, M. ; Hirai, C.

Pub. info.:	Proceedings of the Fourth International Symposium on Carbonate Fuel Cell Technology. pp.28-39, 1997. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	97-4

Conference Proceedings

8. Preparation of Fluorinated Organic-Silica Films from Gas-Phase

Uchida, Y. ; Taguchi, K. ; Matsumura, M.

Pub. info.:	Dielectric material integration for microelectronics. pp.163-168, 1998. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	98-3

Conference Proceedings

9. Short Channel and Flat-Gate Amorphous-Silicon Thin-Film Transistors

Saitoh, A. ; Kim, C.D. ; Sakoda, T. ; Matsumura, M.

Pub. info.:	Proceedings of the Third Symposium on Thin Film Transistor Technologies. pp.123-128, 1996. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	96-23

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Conference Proceedings

10. Mechanism of Oxygen Contamination in PECVD a-Si:H Films

Hiramatsu, M. ; Kimura, Y. ; Jywnonji, M. ; Nishitani, M. ; Matsumura, M.

Pub. info.:	Chemical vapor deposition XVI and EUROCVD 14 : proceedings of the international symposium. pp.701-707, 2003. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2003-8

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Author: Matsumura, M.