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14 results

Conference Proceedings

1. PROPERTIES AND PRODUCTION MECHANISM OF LOW-TEMPERATURE DEPOSITED CAT-CVD POLY-SILICON FILMS

Matsumura, Hideki ; Hosoda, Yoichi ; Furukawa, Seijiro

Pub. info.:	Microcrystalline semiconductors : materials science & devices : symposium held November 30-December 4, 1992, Boston, Massachusetts, U.S.A.. pp.623-628, 1993. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	283

Conference Proceedings

2. Low-temperature direct-oxidation of Si using activated oxygen generated by tungsten catalytic reaction

Kudo, Manabu ; Izumi, Akira ; Matsumura, Hideki

Pub. info.:	Structure and electronic properties of ultrathin dielectric films on silicon and related structures : symposium held November 29-December 1, 1999, Boston, Massachusetts, U.S.A.. pp.207-, 2000. Warrendale, PA. MRS-Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	592

Conference Proceedings

3. Effects of Active ammonia Gas cracked in catalytic-CVD on PZT ferroelectric capacitors

Minimikawa, Toshiharu ; Yonezawa, Yasuto ; Fujimori, Yoshikazu ; Nakamura, Takashi ; Masuda, Atsushi ; Matsumura, Hideki

Pub. info.:	Ferroelectric thin films VIII : symposium held November 29-December 2, 1999, Boston, Massachusetts, U.S.A.. pp.271-, 2000. Warrendale, PA. MRS-Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	596

Conference Proceedings

4. Properties of Cat-CVD Silicon Nitride Films and Their Application as Passivation Films

Okada, Shinya ; Matsumura, Hideki

Pub. info.:	Amorphous and crystalline insulating thin films--1996 : symposium held December 2-4, 1996, Boston, Massachusetts, U.S.A.. pp.109-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	446

Conference Proceedings

5. The novel technique of nanometer-size fabrication by using conventional photolithography

Hashioka, Shinji ; Matsumura, Hideki

Pub. info.:	Materials issues and modeling for device nanofabrication : symposia held November 29-December 2, 1999, Boston, Massachusetts, U.S.A.. pp.313-, 2000. Warrendale, Pa.. MRS-Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	584

Conference Proceedings

6. Guide for Low-Temperature and High-Rate Deposition of Device Quality Polysilicon Films by Cat-CVD Method

Heya, Akira ; Nakata, Kazuhisa ; Izumi, Akira ; Matsumura, Hideki

Pub. info.:	Amorphous and microcrystalline silicon technology - 1998 : symposium held April 14-17, 1998, San Francisco, California, U.S.A.. pp.435-, 1999. Warrendale. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	507

Conference Proceedings

7. Preparation of high-quality ultra-thin gate dielectrics by Cat-CVD and catalytic anneal

Sato, Hidekazu ; Izumi, Akira ; Matsumura, Hideki

Pub. info.:	Chemical processing of dielectrics, insulators and electronic ceramics : symposium held November 29-December 1, 1999, Boston, Massachusetts, U.S.A.. pp.121-, 2000. Warrendale. MRS-Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	606

Conference Proceedings

8. Properties of High Quality p-Type Micro-Crystalline-Si Prepared by Cat-CVD

Matsumura, Hideki ; Katouno, Kouichi ; Itoh, Masaya ; Masuda, Atsushi

Pub. info.:	Amorphous and nanocrystalline silicon-based films - 2003 : symposium held April 22-25, 2003, San Francisco, California, U.S.A.. pp.491-496, 2003. Warrendale. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	762

Conference Proceedings

9. Recent Progress In Industrial Applications of Cat-CVD (Hot-Wire CVD)

Masuda, Atsushi ; Izumi, Akira ; Umemoto, Hironobu ; Matsumura, Hideki

Pub. info.:	Amorphous and heterogeneous silicon-based films - 2002 : symposium held April 2-5, 2002, San Francisco, California, U.S.A.. pp.111-122, 2002. Warrendale. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	715

10.

Conference Proceedings

10. Properties of Large Grain-Size Poly-Si Films by Catalytic Chemical Sputtering

Masuda, Atsushi ; Kamesaki, Koji ; Izumi, Akira ; Matsumura, Hideki

Pub. info.:	Amorphous and heterogeneous silicon-based films - 2001 : symposium held April 16-20, 2001, San Francisco, California, U.S.A.. 2001. Warrendale. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	664

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