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Conference Proceedings
Conference Proceedings
1. PROPERTIES OF CATALYTIC-CVD AMORPHOUS SILICON-GERMANIUM (a-SiGe:H)
Matsumura, H. ; Yamaguchi, M. ; Morigaki, K.
Pub. info.: Amorphous silicon technology, 1990 : symposium held April 17-20, 1990, San Francisco, California, U.S.A..  pp.499-504,  1990.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 192
2.

Conference Proceedings
Conference Proceedings
2. HIGH QUALITY AMORPHOUS SILICON PREPARED BY CATALYTIC CHEMICAL VAPOR DEPOSITION (CTL-CVD) METHOD
Matsumura, H.
Pub. info.: Amorphous silicon semiconductors -- Pure and hydrogenated : symposium held April 21-24, 1987, Anaheim, California, U.S.A..  pp.261-266,  1987.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 95
3.

Conference Proceedings
Conference Proceedings
3. PHOTOCONDUCTIVE AMORPHOUS SILICON CARBIDE PREPARED BY INTERMEDIATE SPECIES SiF2 AND CF4 MIXTURE
Matsumura, H. ; Uesugi, T. ; Ihara, H.
Pub. info.: Materials issues in applications of amorphous silicon technology : symposium held April 15-17, 1985, San Francisco, California, U.S.A..  pp.175-180,  1985.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 49
4.

Conference Proceedings
Conference Proceedings
4. Low Temperature Nitridation of Si Surface Using Gas Decomposition Reaction in CAT-CVD Method
Izumi, A. ; Masuda., A. ; Matsumura, H.
Pub. info.: Proceedings of the International Symposium on Thin Film Materials, Processes, Reliability, and Applications, Thin Film Processes.  pp.277-282,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-30
5.

Conference Proceedings
Conference Proceedings
5. CATALYTIC CHEMICAL VAPOR DEPOSITION (CTL-CVD) METHOD TO OBTAIN HIGH QUALITY AMORPHOUS SILICON ALLOYS
Matsumura, H.
Pub. info.: Amorphous silicon technology : symposium held April 5-8, 1988, Reno, Nevada, U.S.A..  pp.43-48,  1988.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 118
6.

Conference Proceedings
Conference Proceedings
6. Low-Temperature Formation of SiNx Gate Insulator for Thin-Film Transistor Using CAT-CVD Method
Izumi, A. ; Ichise, T. ; Matsumura, H.
Pub. info.: Flat-panel display materials--1998 : symposium held April 13-17, 1998, San Francisco, California, U.S.A..  pp.151-,  1998.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 508
7.

Conference Proceedings
Conference Proceedings
7. Ultrathin High-Quality Silicon Nitride Gate Dielectrics Prepared by Catalytic Chemical Vapor Deposition at Low Temperatures
Sato, H. ; Izumi, A. ; Matsumura, H.
Pub. info.: Ultrathin SiO[2] and high-K materials for USLI gate dielectrics : symposium held April 5-8, 1999, in San Francisco, California, U.S.A..  pp.155-,  1999.  Warrendale, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 567
8.

Conference Proceedings
Conference Proceedings
8. Low-Temperature Formation of Ultrathin SiO2 Layers Using Direct Oxidation Method in a Catalytic Chemical Vapor Deposition System
Izumi, A. ; Sohara, S. ; Kudo, M. ; Matsumura, H.
Pub. info.: Ultrathin SiO[2] and high-K materials for USLI gate dielectrics : symposium held April 5-8, 1999, in San Francisco, California, U.S.A..  pp.115-,  1999.  Warrendale, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 567
9.

Conference Proceedings
Conference Proceedings
9. Properties of Catalytic CVD SiNx for Antireflection Coatings
Izumi, A. ; Matsumura, H.
Pub. info.: Properties and processing of vapor-deposited coatings : symposium held November 30-December 2, 1998, Boston, Massachusetts, U.S.A..  pp.161-,  1999.  Warrendale, PA..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 555
10.

Conference Proceedings
Conference Proceedings
10. Heterocoagulation Behavior of PC Vesicles with Spherical Silica
Yang, B. ; Matsumura, H. ; Kise, H. ; Furusawa, K.
Pub. info.: Proceedings of the International Conference on Colloid and Surface Science, Tokyo, Japan, November 5-8, 2000 : 25th Anniversary of the Division of Colloid and Surface Chemistry, the Chemical Society of Japan.  pp.415-418,  2001.  Amsterdam.  Elsevier
Title of ser.: Studies in surface science and catalysis
Ser. no.: 132