1.

Conference Proceedings

Conference Proceedings
Takeuchi, Tomohiko ; Nishimura, Suzuka ; Sakuma, Tomoyuki ; Matsumoto, Satoru ; Terashima, Kazutaka
Pub. info.: Progress in semiconductor materials V--novel materials and electronic and optoelectronic applications : symposium held November 28-December 1, 2005, Boston, Massachusetts, U.S.A..  pp.127-132,  2006.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 891
2.

Conference Proceedings

Conference Proceedings
Nakabayashi, Yukio ; Osman, Hirman I. ; Toru, Segawa ; Toyonaga, Kazunari ; Matsumoto, Satoru ; Murota, Junichi ; Wada, Kazumi ; Abe, Takao
Pub. info.: Si front-end processing -- physics and technology of dopant-defect interactions III : symposium held April 17-19, 2001, San Francisco, California, U.S.A..  2001.  Warrendale, PA.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 669