1.

Conference Proceedings
Conference Proceedings
1. Extending Planar Single-Gate CMOS & Accelerating the Realization of Double-Gate/Multi-Gate CMOS Devices*
Borland, J.O. ; Iwai, H. ; Maszara, W. ; Wang, H.
Pub. info.: ULSI Process Integration : proceedings of the International Symposium.  pp.330-348,  2003.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-6
2.

Conference Proceedings
Conference Proceedings
2. DYNAMIC ANNEALING PHENOMENA AND THE ORIGIN OF RTA-INDUCED “HAIRPIN" DISLOCATIONS
Maszara, W. ; Sadana, D. K. ; Rozgonyi, G. A. ; Sands, T. ; Washburn, J. ; Wortman, J. J.
Pub. info.: Energy beam-solid interactions and transient thermal processing/1984 : symposium held November 26-30, 1984, Boston, Massachusetts, U.S.A..  pp.277-286,  1985.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 35
3.

Conference Proceedings
Conference Proceedings
3. EXTRINSIC GETTERING WITH EPITAXIAL MISFIT DISLOCATIONS
Salih, A. S. M. ; Maszara, W. ; Kim, H. J. ; Rozgonyi, G. A.
Pub. info.: Impurity diffusion and gettering in silicon : symposium held November 27-30, 1984, Boston, Massachusetts, U.S.A..  pp.61-70,  1985.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 36
4.

Conference Proceedings
Conference Proceedings
4. Ge+PREAMORPHIZATION OF Si: EFFECTS OF DOSE AND VERY LOW TEMPERATURE THERMAL TREATMENT ON EXTENDED DEFECT FORMATION DURING SUBSEQUENT SPE
Myers, E. ; Rozgonyi, G.A. ; Sadana, D.K. ; Maszara, W. ; Wortman, J.J. ; Narayan, J.
Pub. info.: Rapid thermal processing : symposium held December 2-4, 1985, Boston, Massachusetts, U.S.A..  pp.107-114,  1985.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 52
5.

Conference Proceedings
Conference Proceedings
5. INFLUENCE OF RAPID THERMAL ANNEALING OF SHALLOW BF2 IMPLATATION INTO PRE-AMORPHIZED SILICON
Maszara, W. ; Carter, C. ; Sadana, D. K. ; Liu, J. ; Ozguz, V. ; Wortman, J. ; Rozgonyi, G. A.
Pub. info.: Energy beam-solid interactions and transient thermal processing : symposium held November 1983 in Boston, Massachusetts, U.S.A..  pp.285-292,  1984.  New York.  North-Holland
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 23
6.

Conference Proceedings
Conference Proceedings
6. INTRODUCTORY REMARKS -- ALTERNATIVE MATERIALS AND IC PROCESS TECHNOLOGIES
Iwai, H. ; Maszara, W.
Pub. info.: Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology.  pp.325-327,  2002.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-2
7.

Conference Proceedings
Conference Proceedings
7. Dielectrics in SI Nano-Devices: Roles and Challenges
Xiang, Q. ; Krivokapic, Z. ; Maszara, W. ; Lin, M. -R.
Pub. info.: Dielectrics for nanosystems: materials science, processing, reliability, and manufacturing : proceedings of the First international symposium.  pp.86-96,  2004.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2004-04
8.

Conference Proceedings
Conference Proceedings
8. INTRODUCTORY REMARKS -- ALTERNATIVE MATERIALS AND IC PROCESS TECHNOLOGIES
Iwai, H. ; Maszara, W.
Pub. info.: Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology.  pp.325-327,  2002.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-2
9.

Conference Proceedings
Conference Proceedings
9. Temperature Dependent Emissivity on Multilayers of Silicon
Abedrabbo, S. ; Ravindra, N. M. ; Chen, W. ; Rajasekhar, V. ; Golota, T. ; Gokce, O. H. ; Nguyenphu, A. T. Fiory B. ; Nanda, A. ; Speranza, T. ; Maszara, W. ; Williamson, G.
Pub. info.: Rapid thermal and integrated processing VI : symposium held April 1-4, 1997, San Francisco, California, U.S.A..  pp.69-,  1997.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 470