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12 results

Conference Proceedings

1. Challenges and solutions for trench lithography beyond 65nm node [6156-60]

Lu, Z. ; Ho, C.-C. ; Mason, M. ; Anderson, A. ; Mckee, R. ; Jackson, R. ; Zhu, C. ; Terry, M.

Pub. info.:	Design and process integration for microelectronic manufacturing IV : 23-24 February, 2006, San Jose, California, USA. pp.615617-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6156

Conference Proceedings

2. Improving asymmetric printing and low margin using custom illumination for contact hole lithography [6156-62]

Jessen, S ; Terry, M. ; Mason, M. ; O’Brien, S. ; Soper, R. ; Yarbrough, W. ; Wolf, T.

Pub. info.:	Design and process integration for microelectronic manufacturing IV : 23-24 February, 2006, San Jose, California, USA. pp.615616-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6156

Conference Proceedings

3. Resist blur and line edge roughness (Invited Paper)

Zhang, G. ; Terry, M. ; O'Brien, S. ; Soper, R. ; Mason, M. ; Kim, W. ; Wang, C. ; Hansen, S. ; Lee, J. ; Ganeshan, J.

Pub. info.:	Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA. pp.38-52, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5754

Conference Proceedings

4. Design rule considerations for 65-nm node contact using off axis illumination

Jessen, S. ; Mason, M. ; O'Brien, S. ; Terry, M. ; Soper, R. ; Wolf, T.

Pub. info.:	Design and process integration for microelectronic manufacturing III : 3-4 March 2005, San Jose, California, USA. pp.274-284, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5756

Technical Paper

5. Fluidic Thrust Vectoring for Low Observable Air Vehicles

Mason, M. ; Crowther, W.

Pub. info.:	AIAA meeting papers on disc. 2004. [Reston, Va.]. American Institute of Aeronautics and Astronautics
Title of ser.:	AIAA Paper : AIAA Flow Control Conference
Ser. no.:	2nd

Technical Paper

6. Experimental Study of a Dual-Throat Fluidic Thrust-Vectoring Nozzle Concept

Flamm, J. ; Deere, K. ; Berrier, B. ; Johnson, S. ; Mason, M.

Pub. info.:	AIAA meeting papers on disc. 2005. [Reston, Va.]. American Institute of Aeronautics and Astronautics
Title of ser.:	AIAA Paper : AIAA/ASME/SAE/ASEE Joint Propulsion Conference and Exhibit
Ser. no.:	41st

Conference Proceedings

7. Characteristics and reliability of high power multi-mode InGaAs strained quantum well single emitters with CW output power of over 5 W [6104-39]

Sin, Y. ; Presser, N. ; Mason, M. ; Moss, S. C.

Pub. info.:	High-Power Diode Laser Technology and Applications IV. pp.61040H-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6104

Conference Proceedings

8. Mask design rules (45 nm): time for standardization [5992-13]

Mason, M. ; Progler, C. J. ; Martin, P. ; Ham, Y. -M. ; Dillon, B. ; Pack, R. ; Heins, M. ; Gookassian, J. ; Garcia, J. ; Boksha, V.

Pub. info.:	25th Annual BACUS Symposium on Photomask Technology. pp.59920D-, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5992

Conference Proceedings

9. Novel tunable DFB lasers with FIB-deposited heaters

Sin, Y. ; Presser, N. ; Mason, M.

Pub. info.:	Novel In-Plane Semiconductor Lasers IV. pp.262-270, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5738

10.

Conference Proceedings

10. EUV light source and laser considerations for scalability and high-energy conversion efficiency

Mercer, I.P. ; Comley, A. ; Davis-Ansted, S. ; Egan, M. ; Ellwi, S.S. ; Harrison, P. ; Henderson, I. ; Kelly, M. ; Mason, M. ; Middleton, M. ; Morris, I. ; Parsons-Karavassilis, D. ; Nowell, T. ; Raven, P. ; Russel, A. ; Klug, D.R. ; Taylor, A.G.

Pub. info.:	High-Power Laser Ablation IV. Part One pp.463-473, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4760

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Author: Mason, M.