1.

Conference Proceedings
Conference Proceedings
1. MEMS Infrastructure for Prototyping and Production
Markus, K.W. ; Wood, R. ; Dudley, B. ; Koester, D. ; Walters, M.
Pub. info.: Proceedings of the Third International Symposium on Microstructures and Microfabricated Systems.  pp.39-48,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-5
2.

Conference Proceedings
Conference Proceedings
2. 11 The HI-MEMS alliance: electrochemical microfabrication manufacturing technology for MEMS
Markus, K.W. ; McCormick, R.I.
Pub. info.: Proceedings of the Second International Symposium on Electrochemical Microfabrication.  pp.122-129,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-32