1.

Conference Proceedings
Conference Proceedings
1. CARBON AND THE KINETICS OF OXYGEN PRECIPITATION IN SILICON,
Piaizzotto, R. F. ; Marks, S.
Pub. info.: Defects in semiconductors II : symposium held November 1982 in Boston, Massachusetts, U.S.A..  pp.147-152,  1983.  New York.  North-Holland
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 14
2.

Conference Proceedings
Conference Proceedings
2. PZT stack etch for MEMS devices in a capacitively coupled high-density plasma reactor
Werbaneth, P.F. ; Almerico, J. ; Jerde, L.G. ; Marks, S.
Pub. info.: Device and process technologies for MEMS and Microelectronics II : 17-19 December 2001, Adelaide, Australia.  pp.267-273,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4592