1.

Conference Proceedings
Conference Proceedings
1. Simulation of Rapid Thermal Annealed Boron Ultrashallow Junctions in Inert and Oxidizing Ambient
Lerch, W. ; Gluck, M. ; Stolwijk, N. A. ; Walk, H. ; Schafer, M. ; Marcus, S. D. ; Downey, D. F. ; Chow, J. W. ; Marquardt, H.
Pub. info.: Rapid thermal and integrated processing VII : symposium held April 13-15, 1998, San Francisco, California, U.S.A..  pp.237-,  1998.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 525
2.

Conference Proceedings
Conference Proceedings
2. Cobalt and Titanium Metallization of SiGeC for Shallow Contacts
Bair, A. E. ; Alford, T. L. ; Atzmon, Z. ; Marcus, S. D. ; Doller, D. C. ; Morton, R. ; Lau, S. S. ; Mayer, J. W.
Pub. info.: Advanced metallization for future ULSI : symposium held April 8-11, 1996, San Francisco, California, U.S.A..  pp.529-,  1996.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 427