1.

Conference Proceedings
Conference Proceedings
1. Dry Etching of MRAM Structures
Pearton, S.J. ; Cho, H. ; Jung, K.B. ; Childress, J.R. ; Sharifi, F. ; Marburger, J.
Pub. info.: Magnetic materials, structures and processing for information storage: symposium held April 24-27, 2000, San Francisco, California, U.S.A..  pp.F10.2-,  2001.  Warrendale, PA.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 614
2.

Conference Proceedings
Conference Proceedings
2. Ion-enhanced dry etching of magnetic multilayers: Post-etch cleaning and effects of UV illumination
Cho, H. ; Lee, K. P. ; Jung, K. B. ; Sharifi, F. ; Marburger, J. ; Pearton, S. J.
Pub. info.: Fundamental mechanisms of low-energy-beam-modified surface growth and processing : symposium held November 29-December 2, 1999, Boston, Massachusetts, U.S.A..  pp.123-,  2000.  Warrendale, Pa..  MRS-Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 585