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11 results

Conference Proceedings

1. Transient Enhanced Diffusion and Ostwald Ripening of Ion-Implantation Generated Defects in Silicon

Cowern, N.E.B. ; Mannino, G. ; Roozeboom, F. ; Stalk, P.A. ; Huizing, H.G.A. ; van Berkum, J.G.M ; Toan, N.N. ; Woerlee, P.H. ; Cristiano, F. ; Claverie, A.

Pub. info.:	Advances in rapid thermal processing : proceedings of the symposium. pp.125-132, 1999. Pennington, N. J.. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	99-10

Conference Proceedings

2. Role of Silicon and Boron Interstitial Clusters in Transient Enhanced Diffusion

Cowern, N.E.B. ; Mannino, G. ; Roozeboom, F. ; van Berkum, J.G.M ; Colombeau, B. ; Claverie, A.

Pub. info.:	Rapid thermal and other short-time processing technologies : proceedings of the international symposium. pp.61-72, 2000. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2000-9

Conference Proceedings

3. 18 Excimer laser annealing: a solution for the future technology nodes?

Privitera, V. ; La Magna, A. ; Mannino, G. ; Fortunato, G. ; Mariucci, L. ; Svensson, B. C.

Pub. info.:	Advanced short-time thermal processing for Si-based CMOS devices : proceedings of the international symposium. pp.137-144, 2003. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2003-14

Conference Proceedings

4. The Effect of Oxygen on the Electrical Activation and Diffusion of Ion-Implanted Boron

Larsen, K. Kyllesbech ; Stolk, P. A. ; Privitera, V. ; Berkum, J. G. M. van ; Boer, W. B. de ; Mannino, G. ; Cowern, N. E. B. ; Huizing, H. G. A.

Pub. info.:	Defects and diffusion in silicon processing : symposium held April 1-4, 1997, San Francisco, California, U.S.A.. pp.291-, 1997. Pittsburg, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	469

Conference Proceedings

5. Point Defects Migration and Agglomeration in Si at Room Temperature: The Role of Surface and Impurity Content

Privitera, V. ; Coffa, S. ; Larsen, K. Kyllesbech ; Libertino, S. ; Mannino, G. ; Priolo, F.

Pub. info.:	Defects and diffusion in silicon processing : symposium held April 1-4, 1997, San Francisco, California, U.S.A.. pp.163-, 1997. Pittsburg, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	469

Conference Proceedings

6. Ostwald Ripening of {113} Defects Precursors and Transient Enhanced Diffusion

Mannino, G. ; Cowern, N. E. B. ; Stolk, P. A. ; Roozeboom, F. ; Huizing, H. G. A. ; Berkum, J. G. M. van ; Boer, W. B. de ; Cristiano, F. ; Claverie, A. ; Jaraiz, M.

Pub. info.:	Si front-end processing - physics and technology of dopant-defect interactions : symposium held April 6-9, 1999, San Francisco, California, U.S.A.. pp.163-, 1999. Warrendale, PA. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	568

Conference Proceedings

7. Point-Defect Migration in Crystalline Silicon: Impurity Content, Surface and Stress Effects

Coffa, S. ; Libertino, S. ; Magna, A. La ; Privitera, V. ; Mannino, G. ; Priolo, F.

Pub. info.:	Silicon front-end technology--materials processing and modelling, symposium held April 13-15, 1998, San Francisco, California, U.S.A.. pp.93-, 1998. Warrendale, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	532

Conference Proceedings

8. Ultra-Shallow Junction Formation by Excimer Laser Annealing of Ultra-Low Energy B Implanted in Si

Fortunato, G. ; Mariucci, L. ; Privitera, V. ; Magna, A. La ; Whelan, S. ; Mannino, G.

Pub. info.:	CMOS front-end materials and process technology : symposium held April 22-24, 2003, San Francisco, California, U.S.A.. pp.243-254, 2003. Warrendale, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	765

Conference Proceedings

9. Indium in Silicon: A Study on Diffusion and Electrical Activation

Scalese, S. ; Magna, A. La ; Mannino, G. ; Privitera, V. ; Bersani, M. ; Giubertoni, D. ; Solmi, S. ; Pichler, P.

Pub. info.:	CMOS front-end materials and process technology : symposium held April 22-24, 2003, San Francisco, California, U.S.A.. pp.205-210, 2003. Warrendale, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	765

10.

Conference Proceedings

10. Defects and Diffusion in Silicon An Overview

Cowern, N. E. B. ; Mannino, G. ; Stolk, P. A. ; Theunissen, M. J. J.

Pub. info.:	Si front-end processing - physics and technology of dopant-defect interactions : symposium held April 6-9, 1999, San Francisco, California, U.S.A.. pp.79-, 1999. Warrendale, PA. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	568

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