1.

Conference Proceedings
Conference Proceedings
1. Fine pitch grids for an x-ray solar imaging spectrometer fabricated by optical lithography and XeF2 etching
Brennen,R.A. ; Hecht,M.H. ; Wiberg,D.V. ; Manion,S.J. ; Bonivert,W.D. ; Hruby,J.M. ; Pister,K.S.J. ; Kruglick,E.
Pub. info.: Microlithography and Metrology in Micromachining.  pp.226-235,  1995.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2640
2.

Conference Proceedings
Conference Proceedings
2. Fabricating subcollimating grids for an x-ray solar imaging spectrometer using LIGA techniques
Brennen,R.A. ; Hecht,M.H. ; Wiberg,D.V. ; Manion,S.J. ; Bonivert,W.D. ; Hruby,J.M. ; Scholz,M.L. ; Stowe,T.D. ; Kenny,T.W. ; Jackson,K.H. ; Malek,C.Khan
Pub. info.: Microlithography and Metrology in Micromachining.  pp.214-225,  1995.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2640