1.

Conference Proceedings
Conference Proceedings
1. Overview of micromachined platforms for thermal sensing and gas detection
Manginell,R.P. ; Smith,J.H. ; Ricco,A.J.
Pub. info.: Smart structures and materials 1997 : Smart electronics and MEMS : 4-6 March 1997, San Diego, California.  pp.273-284,  1997.  Bellingham.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3046
2.

Conference Proceedings
Conference Proceedings
2. Microfabricated silicon gas chromatographic microchannels: fabrication and performance
Matzke,C.M. ; Kottenstette,R.J. ; Casalnuovo,S.A. ; Frye-Mason,G.C. ; Hudson,M.L. ; Sasaki,D.Y. ; Manginell,R.P. ; Wong,C.C.
Pub. info.: Micromachining and microfabrication process technology IV : 21-22 September, 1998, Santa Clara, California.  pp.262-268,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3511
3.

Conference Proceedings
Conference Proceedings
3. Microfabrication of membrane-based devices by HARSE and combined HARSE/wet etching
Manginell,R.P. ; Frye-Mason,G.C. ; Schubert,W.K. ; Shul,R.J. ; Willison,C.G.
Pub. info.: Micromachining and microfabrication process technology IV : 21-22 September, 1998, Santa Clara, California.  pp.269-276,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3511
4.

Conference Proceedings
Conference Proceedings
4. Characterization of the embedded micromechanical device approach to the monolithic integration of MEMS with CMOS
Smith,J.H. ; Montague,S. ; Sniegowski,J.J. ; Murray,J.R. ; Manginell,R.P. ; McWhorter,P.J. ; Huber,R.J.
Pub. info.: Micromachining and microfabrication process technology II : 14-15 October, 1996, Austin, Texas.  pp.306-314,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2879
5.

Conference Proceedings
Conference Proceedings
5. Electrothermal modeling of a microbridge gas sensor
Manginell,R.P. ; Smith,J.H. ; Ricco,A.J. ; Hughes,R.C. ; Moreno,D.J. ; Huber,R.J.
Pub. info.: Micromachined Devices and Components III.  pp.360-371,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3224