1.

Conference Proceedings
Conference Proceedings
1. Inspection and repair issues for Step-and-Flash Imprint Lithography templates
Nordquist, K. J. ; Dauksher, W. J. ; Mancini, D. P. ; Resnick, D. J. ; Hess, H. F. ; Pettibone, D. W. ; Adler, D. ; Bertsche, K. ; White, R. ; Csuy, J. E. ; Lee, D.
Pub. info.: 24th Annual BACUS Symposium on Photomask Technology.  pp.853-863,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5567
2.

Conference Proceedings
Conference Proceedings
2. Shaped beam technology for nano-imprint mask lithography
Hudek, P. ; Beyer, D. ; Groves, T. R. ; Fortagne, O. K. ; Dauksher, W. J. ; Mancini, D. P. ; Nordquist, K. J. ; Resnick, D. J.
Pub. info.: 20th European Conference on Mask Technology for Integrated Circuits and Microcomponents.  pp.204-208,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5504