Taylor, R. ; Stach, Eric A. ; Malshe, Ajay P. ; Salamo, Gregory
Pub. info.:
Semiconductor defect engineering - materials, synthetic structures and devices : symposium held March 28-April 1, 2005, San Francisco, California, U.S.A.. pp.175-180, 2005. Warrendale, Pa.. Materials Research Society
Spencer, Daryl ; Malshe, Ajay P. ; Foster, Ronald B. ; O'Neal, Chad B.
Pub. info.:
Proceedings, 2003 International Symposium on Microelectronics, November 18-20, 2003, Hynes Convention Center, Boston, Massa Massachusetts, USA. pp.708-713, 2003. Reston, Va.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering