1.

Conference Proceedings
Conference Proceedings
1. Mechanical Enhancement of Nanoporous Low-k Films as Interlayer Dielectrics by Ion Implantation
Roy, Alok Nandini U. ; Patel, Zubin P. ; Mallikarjunan, A. ; Bakhru, H. ; Lu, T.-M.
Pub. info.: Polymer/metal interfaces and defect mediated phenomena in ordered polymers : symposia held December 2-6, 2002, Boston, Massachusetts, U.S.A..  pp.109-232,  2003.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 734
2.

Conference Proceedings
Conference Proceedings
2. Stress Generation in PECVD silicon Nitride Thin Films for Microelectronics Applications
Belyansky, M. ; Klymko, N. ; Madan, A. ; Mallikarjunan, A. ; Li, Y. ; Chakravarti, A. ; Deshpande, S. ; Domenicucci, A. ; Bedell, S. ; Adams, E. ; Coffin, J. ; Tai, L. ; Sun, S-P. ; Widodo, J. ; Lai, C-W.
Pub. info.: Materials, technology and reliability of advanced interconnects - 2005 : symposium held March 28-April 1, 2005, San Francisco, California, U.S.A..  pp.97-102,  2005.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 863
3.

Conference Proceedings
Conference Proceedings
3. Modification Of Low-K Materials For Ulsi Multilevel Interconnects By Ion Implantation
Nandini, Alok ; Roy, U. ; Mallikarjunan, A. ; Kumar, A. ; Fortin, J. ; Shekhawat, G.S. ; Geer, Robert ; Dovidenko, Katherine ; Lifshin, Eric ; Bakhru, H. ; Lu, T.-M.
Pub. info.: Silicon materials - processing characterization and reliability : symposium held April 1-5, 2002, San Francisco, California, U.S.A..  pp.349-354,  2002.  Warrendale.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 716
4.

Conference Proceedings
Conference Proceedings
4. Stress Generation in PECVD Silicon Nitride Thin Films for Microelectronics Applications
Belyansky, M. ; Klymko, N. ; Madan, A. ; Mallikarjunan, A. ; Li, Y. ; Chakravarti, A. ; Deshpande, S. ; Domenicucci, A. ; Bedell, S. ; Adams, E. ; Coffin, J. ; Tai, L. ; Sun, S-P. ; Widodo, J. ; Lai, C-W.
Pub. info.: Thin films : stresses and mechanical properties XI : symposium held March 28-April 1, 2005, San Francisco, California, U.S.A..  pp.325-332,  2005.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 875