1.

Conference Proceedings
Conference Proceedings
1. Improved self-sensing method for semi-active vibration suppression [6169-07]
Makihara, K. ; Onoda, J. ; Minesugi, K.
Pub. info.: Smart structures and materials 2006 : Damping and isolation : 27 February-1 March 2006, San Diego, California, USA.  pp.616907-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6169
2.

Conference Proceedings
Conference Proceedings
2. Influence of Si Substrate Crystallinity of Device Performance
Iwamoto, T. ; Takano, J. ; Makihara, K. ; Ohmi, T.
Pub. info.: Defects in electronic materials II : symposium held December 2-6, 1996, Boston, Massachusetts, U.S.A..  pp.193-,  1997.  Pittsburgh, Penn.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 442
3.

Conference Proceedings
Conference Proceedings
3. CHEMICAL OXIDE PASSIVATION FOR VERY THIN OXIDE FORMATION
Takano, J. ; Makihara, K. ; Ohmi, T.
Pub. info.: Surface chemical cleaning and passivation for semiconductor processing.  pp.381-,  1993.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 315
4.

Conference Proceedings
Conference Proceedings
4. ULTRA THIN OXIDE FORMATION USING CHEMICAL OXIDE PASSIVATION
Nakamura, K. ; Futatsuki, T. ; Makihara, K. ; Ohmi, T.
Pub. info.: Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing.  pp.70-77,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-7
5.

Technical Paper
Technical Paper
5. Self-Sensing Actuator for Semi-Active Vibration Suppression
Onoda, J. ; Makihara, K. ; Yabu, T.
Pub. info.: AIAA meeting papers on disc.  2005.  [Reston, Va.].  American Institute of Aeronautics and Astronautics
Title of ser.: AIAA Paper : AIAA/ASME/ASCE/AHS/ASC Structures, Structural Dynamics, and Materials Conference
Ser. no.: 46th
6.

Technical Paper
Technical Paper
6. Energy-recycling Semi-active Method for Vibration Suppression with Piezoelectric Transducers
Onoda, J. ; Makihara, K. ; Minesugi, K.
Pub. info.: A collection of technical papers : 44th AIAA/ASME/ASCE/AHS/ASC Structures, Structural Dynamics, and Materials Conference : 11th AIAA/ASME/AHS Adaptive Structures Forum : 4th AIAA Gossamer Spacecraft Forum : AIAA Dynamics Specialists Conference, Norfolk, Virginia, 7-10 April 2003.  v. 6  pp.4305-4315,  2003.  Reston, Va.  American Institute of Aeronautics and Astronautics
Title of ser.: AIAA Paper : AIAA/ASME/ASCE/AHS/ASC Structures, Structural Dynamics, and Materials Conference
Ser. no.: 2003
7.

Technical Paper
Technical Paper
7. Energy Recycle Semi-active Vibration Suppression By Voice Coil Transducers
Onoda, J. ; Makihara, K.
Pub. info.: A collection of technical papers : 43rd AIAA/ASME/ASCE/AHS/ASC Structures, Structural Dynamics, and Materials Conference : 10th AIAA/ASME/AHS Adaptive Structures Forum : 4th AIAA Non-Deterministic Approaches Forum : 3rd AIAA Gossamer Spacecraft Forum, Denver, Colorado, 22-25 April 2002.  v. 5  pp.3245-3250,  2002.  Reston, VA.  American Institute of Aeronautics and Astronautics
Title of ser.: AIAA Paper : AIAA/ASME/ASCE/AHS/ASC Structures, Structural Dynamics, and Materials Conference
Ser. no.: 2002