1.

Conference Proceedings
Conference Proceedings
1. Introducing Advanced ULK Dielectric Mateials in Interconnects: Performance and Integration Challenges
Fusalba, F. ; Cornec, C.Le ; Maury, P. ; Remiat, B. ; Jousseaume, V. ; Haxaire, K. ; Mourier, T. ; Haumesser, P.H ; Maitrejean, S. ; Simon, J. ; Chabli, A. ; Passemard, G. ; Fusalba, F. ; Cornec, C.Le ; Maury, P. ; Remiat, B. ; Jousseaume, V.
Pub. info.: Thin film materials, processes, and reliability, plasma processing for the 100 nm node and copper interconnects with low-k inter-level dielectric films : proceedings of the international symposium.  pp.186-205,  2003.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-13
2.

Conference Proceedings
Conference Proceedings
2. Study of Work Function of CVD WSix Thin Film on High-k Dielectric
Maitrejean, S. ; Allegret, S. ; Fillot, F. ; Farjot, T. ; Guillaumot, B. ; Passemard, G.
Pub. info.: Fundamentals of novel oxide/semiconductor interfaces : symposium held December 1-4, 2003, Boston, Massachusetts, U.S.A..  pp.285-290,  2004.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 786
3.

Conference Proceedings
Conference Proceedings
3. Study of Metal Gate Work Function Modulation Using Plasma and SiH4 Treated TiN Thin Films
Fillot, F. ; Maitrejean, S. ; Farjot, T. ; Guillaumot, B. ; Chenevier, B. ; Passemard, G.
Pub. info.: Fundamentals of novel oxide/semiconductor interfaces : symposium held December 1-4, 2003, Boston, Massachusetts, U.S.A..  pp.259-266,  2004.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 786
4.

Conference Proceedings
Conference Proceedings
4. Investigation of Mechanical Properties of Mesoporous Methyl-Substituted SiO2 Thin Films(Methylsilesquioxane Materials)
Verdier, M. ; Montagnat, M. ; Maitrejean, S. ; Passemard, O.
Pub. info.: Thin films : stresses and mechanical properties X : symposium held December 1-5, 2003, Boston, Massachusetts, U.S.A..  pp.263-268,  2002.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 795
5.

Conference Proceedings
Conference Proceedings
5. Mechanical Properties of Porous MSQ Films: Impact of the Porogen Loading and Matrix Crosslinking.
Ciaramella, F. ; Jousseaume, V. ; Maitrejean, S. ; Remiat, B. ; Verdier, M. ; Passemard, G.
Pub. info.: Materials, technology and reliability of advanced interconnects - 2005 : symposium held March 28-April 1, 2005, San Francisco, California, U.S.A..  pp.17-22,  2005.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 863