1.

Conference Proceedings
Conference Proceedings
1. SELECTIVE REMOVAL OF SILICON-GERMANIUM: CHEMICAL AND REACTIVE ION ETCHING
Scott Johnson, F. ; Misra, Veena ; Wortman, J.J. ; Martin, Leanne R. ; Harris, Gari A. ; Maher, Dennis M.
Pub. info.: Silicon-based optoelectronic materials : Symposium held April 12-14, 1993, San Francisco, California, U.S.A..  pp.157-162,  1993.  Pittsburgh, PA.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 298
2.

Conference Proceedings
Conference Proceedings
2. Low Temperature Selective Silicon Epitaxy Using Si2H6, H2 and Cl2 in Ultra High Vacuum Rapid Thermal Chemical Vapor Deposition
Violette, Katherine E. ; Ozturk, Mehmet C. ; O'Neil, Patricia A. ; Christensen, Kim ; Maher, Dennis M.
Pub. info.: Rapid thermal and integrated processing IV : symposium held April 17-20, 1995, San Francisco, California, U.S.A..  pp.335-,  1995.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 387
3.

Conference Proceedings
Conference Proceedings
3. Characterization of MOS Devices Fabricated on Carbon Implanted Silicon Substrates
Ban, Ibrahim ; Ozturk, Mehmet C. ; Christensen, Kim ; Maher, Dennis M.
Pub. info.: Defect and impurity engineered semiconductors and devices : symposium held April 17-21, 1995, San Francisco, California, U.S.A..  pp.737-,  1995.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 378
4.

Conference Proceedings
Conference Proceedings
4. SELF-ALIGNED FORMATION OF C54 TITANIUM GERMANOSILICIDE USING RAPID THERMAL PROCESSING AND APPLICATION TO RAISED, ULTRA-SHALLOW JUNCTIONS
Ashburn, Stanton P. ; Grider, Douglas T. ; Ozturk, Mehmet C. ; Harris, Gari ; Maher, Dennis M.
Pub. info.: Silicides, germanides, and their interfaces : Symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A..  pp.311-,  1994.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 320
5.

Conference Proceedings
Conference Proceedings
5. NUCLEATION AND GROWTH OF POLYCRYSTALLINE SILICON FILMS IN AN ULTRA HIGH VACUUM RAPID THERMAL CHEMICAL VAPOR DEPOSITION REACTOR USING DISILANE AND HYDROGEN
Violette, Katherine E. ; Ozturk, Mehmet ; Harris, Gari ; Sanganeria, Mahesh K. ; Lee, Archie ; Maher, Dennis M.
Pub. info.: Polycrystalline thin films : structure, texture, properties, and applications : symposium held April 4-8, 1994, San Francisco, California, U.S.A..  pp.673-,  1994.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 343
6.

Conference Proceedings
Conference Proceedings
6. Low Temperature Selective Si Epitaxy Using Si2H6 and Cl2: Investigations into Selectivity Robustness and Epitaxial Film Quality
O'Neil, Patricia A. ; Violette, Katherine E. ; Ozturk, Mehmet C. ; Batchelor, Dale ; Maher, Dennis M.
Pub. info.: Rapid thermal and integrated processing V : symposium held April 8-12, 1996, San Francisco, California, U.S.A..  pp.355-,  1996.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 429
7.

Conference Proceedings
Conference Proceedings
7. CLEANING DURING INITIAL STAGES OF EPITAXIAL GROWTH IN AN ULTRA-HIGH VACUUM RAPID THERMAL CHEMICAL VAPOR DEPOSITION REACTOR
Sanganeria, Mahesh K. ; Violette, Katherine E. ; Ozturk, Mehmet C. ; Harris, Gari ; Lee, C. Archie ; Maher, Dennis M.
Pub. info.: Gas-phase and surface chemistry in electronic materials processing : symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A..  pp.463-,  1994.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 334
8.

Conference Proceedings
Conference Proceedings
8. SILICON NUCLEATION ON SILICON DIOXIDE AND SELECTIVE EPITAXY IN AN ULTRA-HIGH VACUUM RAPID THERMAL CHEMICAL VAPOR DEPOSITION REACTOR USING DISILANE IN HYDROGEN
Violette, Katherine E. ; Sanganeria, Mahesh K. ; Ozturk, Mehmet C. ; Harris, Gari ; Maher, Dennis M.
Pub. info.: Gas-phase and surface chemistry in electronic materials processing : symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A..  pp.519-,  1994.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 334