1.

Conference Proceedings
Conference Proceedings
1. *THE KINETICS AND MICROSTRUCTURE OF ION BEAM INDUCED CRYSTALLIZATION OF SILICON
Williams, J. S. ; Brown, W. L. ; Elliman, R. G. ; Knoell, R. V. ; Maher, D. M. ; Seidel, T. E.
Pub. info.: Ion beam processes in advanced electronic materials and device technology : symposium held April 15-18, 1985, San Francisco, California, U.S.A..  pp.79-90,  1985.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 45
2.

Conference Proceedings
Conference Proceedings
2. THE NUCLEATION AND PROPAGATION OF MISFIT DISLOCATIONS NEAR THE CRITICAL THICKNESS IN Ge-Si STRAINED EPILAYERS
Kvam, E. P. ; Eaglesham, D. J. ; Maher, D. M. ; Humphreys, C. J. ; Bean, J. C. ; Green, G. S. ; Tanner, B. K.
Pub. info.: Defects in electronic materials : symposium held November 30-December 3, 1987, Boston, Massachusetts, U.S.A..  pp.623-628,  1988.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 104
3.

Conference Proceedings
Conference Proceedings
3. RAPID ANNEALING IN Si
Siedel, T. E. ; Pai, C> S. ; Lischner, D. J. ; Maher, D. M. ; Knoell, ; Williams, J. S. ; Penumalli, B. R. ; Jacobson, D. C.
Pub. info.: Energy beam-solid interactions and transient thermal processing/1984 : symposium held November 26-30, 1984, Boston, Massachusetts, U.S.A..  pp.329-340,  1985.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 35
4.

Conference Proceedings
Conference Proceedings
4. OXIDE REMOVAL ON SILICON BY RAPID THERMAL PROCESSING USING SiH2Cl2 AND H2
Ren, X. ; Ozturk, M. C. ; Harris, G. ; Batchelor, D. ; Maher, D. M.
Pub. info.: Rapid thermal and integrated processing III : symposium held April 4-7, 1994, San Francisco, California, U.S.A..  pp.243-,  1994.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 342
5.

Conference Proceedings
Conference Proceedings
5. Rapid Thermal Chemical Vapor Deposition of Polycrystalline Silicon-Germanium Films on SiO2 and Their Properties
Li, V. Z-Q ; Mirabedini, M. R. ; Kuehn, R. T. ; Gladden, D. ; Batchelor, D. ; Christenson, K. ; Wortman, J. J. ; Ozturk, M. C. ; Maher, D. M.
Pub. info.: Polycrystalline thin films II : structure, properties, and applications : symposium held November 27-December 1, 1995, Boston, Massachusetts, U.S.A..  pp.333-,  1996.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 403
6.

Conference Proceedings
Conference Proceedings
6. High Quality RTCVD Sidewall Spacer Dielectrics
Miles, D. S. ; Mirabedini, M. R. ; Venables, D. ; Wortman, J. J. ; Maher, D. M.
Pub. info.: Rapid thermal and integrated processing IV : symposium held April 17-20, 1995, San Francisco, California, U.S.A..  pp.277-,  1995.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 387
7.

Conference Proceedings
Conference Proceedings
7. GATE QUALITY OXIDES PREPARED BY RAPID THERMAL CHEMICAL VAPOR DEPOSITION
Kuehn, R. T. ; Xu, X. ; Holcombe, D. J. ; Misra, V. ; Wortman, J. J. ; Hauser, J. R. ; Wang, Q. -F. ; Maher, D. M.
Pub. info.: Gas-phase and surface chemistry in electronic materials processing : symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A..  pp.531-,  1994.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 334
8.

Conference Proceedings
Conference Proceedings
8. A STUDY OF SURFACE AND SUBSURFACE PROPERTIES OF Si(100) AFTER HYDROGEN ION-BEAM EXPOSURE
Liu, H. X. ; Schneider, T. P. ; Montgomery, J. ; Chen, Y. L. ; Buczkowski, A. ; Shimura, F. ; Nemanich, R. J. ; Maher, D. M. ; Korzec, D. ; Engemann, J.
Pub. info.: Surface chemical cleaning and passivation for semiconductor processing.  pp.231-,  1993.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 315
9.

Conference Proceedings
Conference Proceedings
9. SITE OCCUPATION OF EXCESS Al ATOMS IN OFF-STOICHIOMETRIC ｦﾃ-TiAl: MEASUREMENT OF DEBYE-WALLER FACTORS
Swaminathan, S. ; Jones, I. P. ; Maher, D. M. ; Fraser, H. L.
Pub. info.: High-Temperature ordered intermetallic alloys VI : symposium held November 28-December 1, 1994, Boston, Massachusetts, U.S.A..  pp.175-,  1995.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 364
10.

Conference Proceedings
Conference Proceedings
10. Substrate Surface Dependence of the Microstructure of ｦﾌc-Si,Ge:H Deposited by Reactive Magnetron Sputtering (RMS)
Cho, S. M. ; Christensen, K. ; Wolfe, D. ; Ying, H. ; Lee, D. R. ; Lucovsky, G. ; Maher, D. M.
Pub. info.: Surface/interface and stress effects in electronic material nanostructures : symposium held November 27-December 1, 1995, Boston, Massachusetts, U.S.A..  pp.241-,  1996.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 405