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Conference Proceedings

1. Effect of Particle Size During Tungsten Chemical-Mechanical Polishing

Bielmann, M. ; Mahajan, V. ; Singh, R. K.

Pub. info.:	Chemical mechanical polishing -- fundamentals and challenges : symposium held April 5-7, 1999, San Francisco, California, U.S.A.. pp.103-108, 2000. Warrendale, PA. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	566

Conference Proceedings

2. Abrasive Effects in Oxide Chemical-Mechanical Polishing

Bielnann, M. ; Mahajan, V. ; Singh, R. K.

Pub. info.:	Chemical mechanical polishing -- fundamentals and challenges : symposium held April 5-7, 1999, San Francisco, California, U.S.A.. pp.27-32, 2000. Warrendale, PA. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	566