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14 results

Conference Proceedings

1. REMOTE PLASMA CLEANING AND ION-INDUCED HYDROGEN DESORPTION FROM THE SILICON (100) SURFACE AND ITS APPLICATIONS TO Si EPITAXY

Kinosky, David S. ; Qian, R. ; Mahajan, A. ; Thomas, S. ; Fretwell, J. ; Munguia, P. ; Banerjee, S. ; Tasch, A.

Pub. info.:	Beam-solid interactions : fundamentals and applications : symposium held November 30-December 4, 1992, Boston, Massachusetts, U.S.A.. pp.831-836, 1993. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	279

Conference Proceedings

2. THE DEPENDENCE OF DEFECT DENSITY IN GeXSi1-X/Si HETEROSTRUCTURES GROWN BY REMOTE PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION ON DEPOSITION PARAMETERS

Kinosky, D. ; Qian, R. ; Hsu, T. ; Irby, J. ; Mahajan, A. ; Thomas, S. ; Banerjee, S. ; Tasch, A. ; Magee, C. ; Grove, C. L.

Pub. info.:	Mechanisms of Heteroepitaxial growth : symposium held April 27-30, 1992, San Francisco, California, U.S.A.. pp.445-450, 1992. Pittsburgh, PA. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	263

Conference Proceedings

3. GROWTH AND HIGH RESOLUTION TEM CHARACTERIZATION OF Ge Si1-x/Si HETERO-STRUCTURES BY REMOTE PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION

Qian, R. ; Chung, I. ; Kinosky, D. ; Hsu, T. ; Irby, J. ; Mahajan, A. ; Thomas, S. ; Banerjee, S. ; Tasch, A. ; Rabenberg, L. ; Grove, C. ; Magee, C.

Pub. info.:	Photons and low energy particles in surface processing : symposium held Decmber[i.e. December] 3-6, 1991, Boston, Massachusetts, U.S.A.. pp.353-360, 1992. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	236

Conference Proceedings

4. GROWTH OF Ge-ON-Si STRUCTURES USING REMOTE PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION

Qian, Rong Z. ; Kinosky, D. ; Mahajan, A. ; Thomas, S. ; Fretwell, J. ; Munguia, P. ; Banerjee, S. ; Tasch, A.

Pub. info.:	Semiconductor heterostructures for photonic and electronic applications : symposium held November 30-December 4, 1992, Boston, Massachusetts, U.S.A.. pp.421-426, 1993. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	281

Conference Proceedings

5. *IN SITU LOW TEMPERATURE CLEANING AND PASSIVATION OF SILICON BY REMOTE HYDROGEN PLASMA FOR SILICON-BASED EPITAXY

Banerjee, S. ; Tasch, A. ; Hsu, T. ; Qian, R. ; Kinosky, D. ; Irby, J. ; Mahajan, A. ; Thomas, S.

Pub. info.:	Chemical surface preparation, passivation, and cleaning for semiconductor growth and processing : symposium held April 27-29, 1992, San Francisco, California, U.S.A.. pp.43-54, 1992. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	259

Conference Proceedings

6. CHARACTERIZATION OF IN SITU P-TYPE ANDN-TYPE DOPED Si AND GeXSi1-X FILMS GROWN BY LOW TEMPERATURE REMOTE PLASMA CHEMICAL VAPOR DEPOSITION

Thomas, S. ; Irby, J. ; Kinosky, D. ; Qian, R. ; Iqbal, I. ; Mahajan, A. ; Benerjee, S. ; Tasch, A ; Magee, C.

Pub. info.:	Materials modification by energetic atoms and ions : symposium held April 28-30, 1992, San Francisco, California, U.S.A.. pp.223-228, 1992. Pittsburgh, PA. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	268

Conference Proceedings

7. GROWTH AND HIGH RESOLUTION TEM CHARACTERIZATION OF GexSi1-x/Si HETERO-STRUCTURES BY REMOTE PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION

Qian, R. ; Chung, I. ; Kinosky, D. ; Hsu, T. ; Irby, J. ; Mahajan, A. ; Thomas, S. ; Banerjee, S. ; Tasch, A. ; Rabenberg, L. ; Grove, C. ; Magee, C.

Pub. info.:	Phase formation and modification by beam-solid interactions : symposium held December 2-6, 1991, Boston, Massachusetts, U.S.A.. pp.811-818, 1992. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	235

Conference Proceedings

8. HYDROGEN PLASMA CLEANING OF THE Si(100) SURFACE: REMOVAL OF OXYGEN AND CARBON AND THE ETCHING OF Si

Kinosky, David ; Qian, R. ; Mahajan, A. ; Thomas, S. ; Munguia, P. ; Fretwell, J. ; Banerjee, S. ; Tasch, A.

Pub. info.:	Surface chemical cleaning and passivation for semiconductor processing. pp.219-, 1993. Pittsburgh, PA. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	315

Conference Proceedings

9. HF/ALCOHOL PREPARATION OF WAFERS FOR THE REDUCTION OF HAZE IN LOW TEMPERATURE Si EPITAXY BY REMOTE PLASMA CHEMICAL VAPOR DEPOSITION

Kinosky, D. ; Qian, R. ; Mahajan, A. ; Thomas, S. ; Munguia, P. ; Fretwell, J. ; Banerjee, S. ; Tasch, A. ; Magee, C.

Pub. info.:	Surface chemical cleaning and passivation for semiconductor processing. pp.79-, 1993. Pittsburgh, PA. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	315

10.

Technical Paper

10. Short Crack Growth Model in a Particulate Composite Using Nonlinear Elastic Fracture Mechanics.

Zhang, Y. ; Chu, T. ; Mahajan, A.

Pub. info.:	A.S.M.E. paper. 2003. New York, NY. American Society of Mechanical Engineers
Title of ser.:	ASME Technical Paper : IMECE
Ser. no.:	2003

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Author: Mahajan, A.