1.

Conference Proceedings
Conference Proceedings
1. The Role of Cluster Size and Topology on the Ripening of Defect Aggregates in Crystalline Si
Magna, A. La ; Coffa, S. ; Colombo, L.
Pub. info.: Multiscale modelling of materials : symposium held November 30-December 3, 1998, Boston, Massachusets, U.S.A..  pp.241-,  1999.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 538
2.

Conference Proceedings
Conference Proceedings
2. Point-Defect Migration in Crystalline Silicon: Impurity Content, Surface and Stress Effects
Coffa, S. ; Libertino, S. ; Magna, A. La ; Privitera, V. ; Mannino, G. ; Priolo, F.
Pub. info.: Silicon front-end technology--materials processing and modelling, symposium held April 13-15, 1998, San Francisco, California, U.S.A..  pp.93-,  1998.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 532
3.

Conference Proceedings
Conference Proceedings
3. Ultra-Shallow Junction Formation by Excimer Laser Annealing of Ultra-Low Energy B Implanted in Si
Fortunato, G. ; Mariucci, L. ; Privitera, V. ; Magna, A. La ; Whelan, S. ; Mannino, G.
Pub. info.: CMOS front-end materials and process technology : symposium held April 22-24, 2003, San Francisco, California, U.S.A..  pp.243-254,  2003.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 765
4.

Conference Proceedings
Conference Proceedings
4. Indium in Silicon: A Study on Diffusion and Electrical Activation
Scalese, S. ; Magna, A. La ; Mannino, G. ; Privitera, V. ; Bersani, M. ; Giubertoni, D. ; Solmi, S. ; Pichler, P.
Pub. info.: CMOS front-end materials and process technology : symposium held April 22-24, 2003, San Francisco, California, U.S.A..  pp.205-210,  2003.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 765
5.

Conference Proceedings
Conference Proceedings
5. Ultra-Low Energy Boron Implants in Crystalline Silicon: Atomic Transport Properties and Electrical Activation
Napolitani, E. ; Carnera, A. ; Privitera, V. ; Magna, A. La ; Schroer, E. ; Priolo, F. ; Mannino, G. ; Moffatt, S.
Pub. info.: Si front-end processing - physics and technology of dopant-defect interactions : symposium held April 6-9, 1999, San Francisco, California, U.S.A..  pp.43-,  1999.  Warrendale, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 568