1.

Conference Proceedings
Conference Proceedings
1. ON THE USE OF SECONDARY ION MASS SPECTROMETRY IN SEMICONDUCTOR DEVICE MATERIALS AND PROCESS DEVELOPMENT
Magee, Charles W. ; Botnick, Ephraim M.
Pub. info.: Applied materials characterization : symposium held April 15-18, 1985, San Francisco, California, U.S.A..  pp.229-240,  1985.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 48
2.

Conference Proceedings
Conference Proceedings
2. Non-Routine Dopant, Impurity and Stoichiometry Characterization of SiGe, SiON and Ultra-Low Energy B-Implanted Si Using Secondary Ion Mass Spectrometry
Magee, Charles W. ; Buyuklimanli, Temel H. ; Marino, John W. ; Novak, Steven W. ; Sahiner, M. Alper
Pub. info.: Silicon front-end junction formation technologies : symposium held April 2-4, 2002, San Francisco, California, U.S.A..  pp.263-276,  2002.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 717
3.

Conference Proceedings
Conference Proceedings
3. XAFS as a Direct Local Structural Probe in Revealing the Effects of C Presence in B Diffusion in SiGe Layers
Sahiner, M.Alper ; Ansari, Parviz ; Carroll, Malcolm S. ; Magee, Charles W. ; Novak, Steven W. ; Woicik, Joseph C.
Pub. info.: Silicon front-end junction formation : physics and technology : symposium held April 13-15, 2004, San Francisco, California, U.S.A..  pp.481-488,  2004.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 810
4.

Conference Proceedings
Conference Proceedings
4. The Role Of Ge in Cluster Formation in B and BF2 Implanted Si Wafers After Ge Pre-Amorphization
Sahiner, M. Alper ; Magee, Charles W. ; Downey, Daniel F. ; Arevalo, Edwin ; Woicik, Joseph C.
Pub. info.: Radiation effects and ion-beam processing of materials : symposium held December 1-5, 2003, Boston, Massachusetts, U.S.A..  pp.301-308,  2004.  Warrendale, PA.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 792
5.

Conference Proceedings
Conference Proceedings
5. Non-Routine Dopant, Impurity and Stoichiometry Characterization of SiGe, SiON and Ultra-Low Energy B-Implanted Si Using Secondary Ion Mass Spectrometry
Magee, Charles W. ; Buyuklimanli, H. ; Marino, John W. ; Novak, Steven W. ; Sahiner, M. Alper
Pub. info.: Silicon materials - processing characterization and reliability : symposium held April 1-5, 2002, San Francisco, California, U.S.A..  pp.439-450,  2002.  Warrendale.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 716