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29 results

Conference Proceedings

1. Analytic Model for Self and Mutual Frequency- Dependent Impedances of Multiconductor Interconnects on Lossy Silicon Substrates

Ymeri, Hasan ; Nauwelaers, Bart ; Maex, Karen ; Roest, David De ; Stucchi, Michele

Pub. info.:	Proceedings : International Symposium on Advanced Packaging Materials : processes, properties and interfaces, Chateau Elan, Braselton, Georgia, March 11-14, 2001. pp.628-633, 2001. Washington, DC. IMAPS
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4587

Conference Proceedings

2. GROWTH OF MONOCRYSTALLINE CoSi2 ON CoSi2 SEEDS IN (100)Si

Maex, Karen

Pub. info.:	Advanced metallizations in microelectronics : symposium held April 16-20, 1990, San Francisco, California, U.S.A.. pp.111-116, 1990. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	181

Conference Proceedings

3. TEMPERATURE CONTROL AND UNIFORMITY DURING RAPID THERMAL SILICIDATION

Eichhammer, Wolfgang ; Vandernabeele, Peter ; Maex, Karen

Pub. info.:	Rapid thermal and integrated processing : symposium held April 30-May 3, 1991, Anaheim, California, U.S.A.. pp.487-492, 1991. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	224

Conference Proceedings

4. Comparison of the Electromigration Behavior of Al(MgCu) With Al(Cu) and Al(SiCu)

Li, Hua ; Witvrouw, Ann ; Jin, Sing ; Bender, Hugo ; Maex, Karen ; Froyen, Ludo

Pub. info.:	Advanced interconnects and contact materials and processes for future integrated circuits : symposium held April 13-16, 1998, San Francisco, California, U.S.A.. pp.133-, 1998. Warrendale, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	514

Conference Proceedings

5. In-Line Ambient Impurity Measurement on a Rapid Thermal Process Chamber by Atmospheric Pressure Ionization Mass Spectrometry

Kondoh, Eiichi ; Vereecke, Guy ; Heyns, Marc M. ; Maex, Karen ; Gutt, Thomas ; Nenyei, Zsolt

Pub. info.:	Rapid thermal and integrated processing VII : symposium held April 13-15, 1998, San Francisco, California, U.S.A.. pp.51-, 1998. Pittsburgh, PA. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	525

Conference Proceedings

6. Segregation of Cu on Etched and Non-Etched Al(Cu) Surface

Li, Hua ; Maex, Karen ; Brijs, Bert ; Conard, Thierry ; Vandervorst, Wilfried ; Baklanov, Michael ; Boullart, Werner ; Froyen, Ludo

Pub. info.:	Materials reliability in microelectronics VIII : symposium held April 13-16, 1998, San Francisco, California, U.S.A.. pp.77-, 1998. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	516

Conference Proceedings

7. The Control and Impact of Processing Ambient During RTP

Maex, Karen ; Kondoh, Eiichi ; Lauwers, Anne ; DePotter, Muriel ; Prost, Joris

Pub. info.:	Advanced interconnects and contact materials and processes for future integrated circuits : symposium held April 13-16, 1998, San Francisco, California, U.S.A.. pp.239-, 1998. Warrendale, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	514

Conference Proceedings

8. New Approaches for Formation of Ultra-Thin PtSi Layers for Infrared Applications

Donaton, Ricardo A. ; Jin, Sing ; Bender, Hugo ; Zagrebnov, Maxim ; Baert, Kris ; Maex, Karen ; Vantomme, Andre ; Langouche, Guido

Pub. info.:	Advanced interconnects and contact materials and processes for future integrated circuits : symposium held April 13-16, 1998, San Francisco, California, U.S.A.. pp.241-, 1998. Warrendale, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	514

Conference Proceedings

9. A New Ultra-Low-K Ild Material Based On Organic-Inorganic Hybrid Resins

Zhong, Ben ; Meynen, Herman ; Iocopi, Francesca ; Weidner, Ken ; Mailhouitre, Stephane ; Moyer, Eric ; Bargeron, Cory ; Schalk, Paul ; Peck, Alan ; Hove, Marleen Van ; Maex, Karen

Pub. info.:	Silicon materials - processing characterization and reliability : symposium held April 1-5, 2002, San Francisco, California, U.S.A.. pp.575-580, 2002. Warrendale. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	716

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Conference Proceedings

10. Ni-Silicided Deep Source/Drain Junctions Formed by Solid Phase Epitaxial Regrowth

Lauwers, Anne ; Lindsay, Richard ; Henson, Kirklen ; Severi, Simone ; Akheyar, Amal ; Pawlak, Bartek J. ; Potter, Muriel de ; Maex, Karen

Pub. info.:	Silicon front-end junction formation : physics and technology : symposium held April 13-15, 2004, San Francisco, California, U.S.A.. pp.43-48, 2004. Warrendale, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	810

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