1.

Conference Proceedings
Conference Proceedings
1. Development of a MEMS-based micro combustor for a micro gas turbine engine
Shan, X. C. ; Jin, Y. F. ; Wang, Z. F. ; Wang, C. K. ; Murakoshi, Y. ; Maeda, R.
Pub. info.: Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II.  pp.337-344,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5650
2.

Conference Proceedings
Conference Proceedings
2. Biomimetic actuator based on dielectric polymer
Choi, H. ; Ryew, S. ; Jung, K. ; Jeon, J.W. ; Kim, H. ; Nam, J.-D. ; Takanishi, A. ; Maeda, R. ; Kaneko, K. ; Tanie, K.
Pub. info.: Smart structures and materials 2002 : electroactive polymer actuators and devices (EAPAD) : 18-21 March 2002, San Diego, USA.  pp.138-149,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4695
3.

Conference Proceedings
Conference Proceedings
3. Microsensors and actuator arrays based on Pb(Zr,Ti) O3 thin film for AFM data storage
Chu, J. ; Lu, J. ; Wu, Y. ; Huang, W. ; Maeda, R. ; Itoh, T. ; Suga, T.
Pub. info.: Micromachining and Microfabrication Process Technology and Devices.  pp.379-383,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4601
4.

Conference Proceedings
Conference Proceedings
4. Optical switch array based on microforming process
Hashiura, Y. ; Ikehara, T. ; Kitajima, A. ; Goto, H. ; Maeda, R.
Pub. info.: Device and process technologies for MEMS and Microelectronics II : 17-19 December 2001, Adelaide, Australia.  pp.414-421,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4592
5.

Conference Proceedings
Conference Proceedings
5. Si-based multilayered print circuit board for MEMS packaging fabricated by Si deep etching, bonding, and vacuum metal casting
Murakoshi, Y. ; Hanada, K. ; Li, Y. ; Uchino, K. ; Suzuki, T. ; Maeda, R.
Pub. info.: Device and process technologies for MEMS and Microelectronics II : 17-19 December 2001, Adelaide, Australia.  pp.473-480,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4592
6.

Conference Proceedings
Conference Proceedings
6. In situ deposition of epitaxial PZT films by pulsed laser deposition
Wang, Z. J. ; Yan, L. J. ; Kokawa, H. ; Maeda, R.
Pub. info.: Smart materials III : 13-15 December 2004, Sydney, Australia.  pp.89-96,  2004.  Bellingham, Wash., USA.  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5648
7.

Conference Proceedings
Conference Proceedings
7. Micro hot embossing for high-aspect-ratio structure with materials flow enhancement by polymer sheet
Murakoshi, Y. ; Shan, X.-C. ; Sano, T. ; Takahashi, M. ; Maeda, R.
Pub. info.: Device and process technologies for MEMS, microelectronics, and photonics III : 10-12 December 2003, Perth, Australia.  pp.532-539,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5276
8.

Conference Proceedings
Conference Proceedings
8. Sol-gel deposition of PZT thick film on Pt/Ti/SOI substrate and application to 2D micro scanning mirror
Kobayashi, T. ; Tsaur, J. ; Ichiki, M. ; Maeda, R.
Pub. info.: Device and process technologies for MEMS, microelectronics, and photonics III : 10-12 December 2003, Perth, Australia.  pp.524-531,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5276
9.

Conference Proceedings
Conference Proceedings
9. Microfabrication of thick and bulk PZT materials for piezoelectric actuator
Lee, S.H. ; Maeda, R. ; Esashi, M.
Pub. info.: Nano- and Microtechnology: Materials, Processes, Packaging, and Systems.  pp.365-372,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4936
10.

Conference Proceedings
Conference Proceedings
10. Optimization of Au mask fabrication processes for LIGA applications
Shan, X.C. ; Maeda, R. ; Ikehara, T. ; Mekaru, H. ; Hattori, T.
Pub. info.: Nano- and Microtechnology: Materials, Processes, Packaging, and Systems.  pp.356-364,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4936