1.

Conference Proceedings
Conference Proceedings
1. High-efficiency replicated diffractive optics
Blough,C. ; Faklis,D. ; Mack,S.K. ; Michaels,R.L. ; Ward,S.J.
Pub. info.: Design, fabrication, and applications of precision plastic optics : 23-24 October, 1995, Philadelphia, Pennsylvania.  pp.50-55,  1995.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2600
2.

Conference Proceedings
Conference Proceedings
2. Error separation technique for microlithographic lens testing with null configurations
Mack,S.K. ; Rich,T. ; Webb,J.E. ; Dewa,P.G. ; Schreiber,H.
Pub. info.: Optical Microlithography XIV.  4346  pp.1328-1339,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4346
3.

Conference Proceedings
Conference Proceedings
3. Applications of a grating shearing interferometer at 157 nm
Schreiber,H. ; Dewa,P.G. ; Dunn,M.M. ; Hordin,R. ; Mack,S.K. ; Statt,B.D. ; Tompkins,P.J.
Pub. info.: Optical Microlithography XIV.  4346  pp.1095-1106,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4346
4.

Conference Proceedings
Conference Proceedings
4. 157-nm Twyman-Green interferometer for lens testing
Statt,B.D. ; Dewa,P.G. ; Mack,S.K. ; Schreiber,H. ; Stone,B.D. ; Tompkins,P.J.
Pub. info.: Optical Microlithography XIV.  4346  pp.1107-1114,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4346