Rossi, M. ; Rudmann, H. ; Marty, B. ; Maciossek, A.
Pub. info.:
Lithographic and micromachining techniques for optical component fabrication II : 3-4 August 2003, San Diego, California, USA. pp.148-154, 2003. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Proceedings of the Fourth International Symposium on Magnetic Materials, Processes, and Devices : applications to storage and microelectromechanical systems (MEMS). pp.376-385, 1995. Pennington, NJ. Electrochemical Society