1.

Conference Proceedings
Conference Proceedings
1. ENHANCED GATE OXIDE RELIABILITY THROUGH FLUORINE INCORPORATION AND THE INFLUENCE OF POLYSILICON PROCESS VARIATIONS
MacWilliams, K. P. ; Lowry, L. E. ; Lin, S. T. ; Song, M. ; Cole, R. ; Brown, S.
Pub. info.: Materials reliability issues in microelectronics : symposium held April 30-May 3, 1991, Anaheim, California, U.S.A..  pp.259-264,  1991.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 225
2.

Conference Proceedings
Conference Proceedings
2. Characterization of Copper Diffusion into Al and Al-1% Si Polycrystalline Thin Films
Walsh, L. H. ; Ramseyer, G. O. ; Beasock, J. V. ; Helbig, H. F. ; MacWilliams, K. P.
Pub. info.: Polycrystalline thin films II : structure, properties, and applications : symposium held November 27-December 1, 1995, Boston, Massachusetts, U.S.A..  pp.663-,  1996.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 403