1.

Conference Proceedings
Conference Proceedings
1. Analysis of the Pre-epi Bake Conditions on the Defect Creation in Recessed SiGe S/D Junctions
M.B. Gonzalez ; N. Thomas ; E. Simoen ; P. Verheyen ; A. Hikavyy
Pub. info.: Analytical and diagnostic techniques for semiconductor materials, devices and processes 7.  pp.47-53,  2007.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 11(3)
2.

Conference Proceedings
Conference Proceedings
2. Diode Analysis of Electrically Active Defects in Recessed SiGe Source/Drain Diodes
E.R. Simoen ; M.B. Gonzalez ; G. Eneman ; P. Verheyen ; C.L. Claeys
Pub. info.: SiGe and Ge, materials, processing, and devices.  pp.655-665,  2006.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 3(7)
3.

Conference Proceedings
Conference Proceedings
3. Impact of Millisecond Laser Anneal on the Thermal Stress- Induced Defect Creation in Si1-xGex Source /Drain Junctions
M.B. Gonzalez ; E. Simoen ; E. Rosseel ; P. Verheyen ; L. Souriau
Pub. info.: Advanced gate stack, source/drain and channel engineering for Si-based CMOS 4 : new materials, processes and equipment.  pp.23-30,  2008.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 13(1)